Laser heterodyne interferometry method and device for diagonal incident light based on corner cube

A technology of laser heterodyne interference and corner cube prism, which is applied in the field of laser applications, can solve the problems that cannot meet the requirements of high precision and resolution of interferometers, limit the development of ultra-precision machining and measurement fields, and be easily affected by ambient temperature. Achieve the effects of adjustment difficulty and high processing cost, eliminate temperature drift, and reduce adjustment difficulty

Active Publication Date: 2016-04-13
HARBIN INST OF TECH
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Problems solved by technology

However, the optical structure of this method is asymmetric and is easily affected by the ambient temperature.
[0006] To sum up, none of the existing laser heterodyne interferometry methods can meet the high precision and resolution requirements of the interferometer for ultra-precision machining measurement, which severely limits the development of the field of ultra-precision machining measurement.

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  • Laser heterodyne interferometry method and device for diagonal incident light based on corner cube
  • Laser heterodyne interferometry method and device for diagonal incident light based on corner cube
  • Laser heterodyne interferometry method and device for diagonal incident light based on corner cube

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Embodiment Construction

[0026] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0027] A kind of diagonal incident light laser heterodyne interferometry device based on corner cube prism, this device comprises non-polarizing beam splitting prism 1, photodetector A6, photodetector B7; The incident point is located at the diagonal position of the incident surface, and the non-polarizing beamsplitter prism 1 outputs two interferometric beams, one of which is connected to the photodetector A6, and the other interferometric beam is connected to the photodetector B7; the device also includes a fixed angle Cube prism A3, fixed corner cube prism B2, target end corner cube prism C4 and target side corner cube prism D5; Described fixed corner cube prism A3 and fixed corner cube prism B2 are positioned at non-polarizing beam splitter 1 reflected light output end, target end The corner cube C4 and the target corner cube D5 are located at the...

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Abstract

The invention relates to a diagonal incident light laser heterodyne interference measurement method and a diagonal incident light laser heterodyne interference measurement device on the basis of a pyramid prism and belongs to the technical field of laser application. The method disclosed by the invention adopts two beams of spatially separated parallel light with different frequences; incidence points of the two parallel light beams on an unpolarized beam splitter prism are positioned on a diagonal line of an incident plane and are symmetrical around a center point of the incident plane; the pyramid prisms are used as a reference prisms and measurement prisms; by the method, two interference measurement signals with reverse doppler frequency shifts are finally generated to carry out interference measurement; the method and the device which are disclosed by the invention are insensitive for inclination of a measured object; the frequency aliasing phenomenon in an interferometer is eliminated; measurement accuracy of heterodyne interference measurement is improved; and meanwhile, resolution of heterodyne interference measurement is doubled.

Description

technical field [0001] The invention belongs to the field of laser application technology, and mainly relates to a method and device for measuring diagonal incident light laser heterodyne interferometry based on a corner cube. Background technique [0002] Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy; at the same time, new challenges are raised for the measurement accuracy and resolution of heterodyne interferometry. [0003] In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abroad have done a lot of resear...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B9/02
Inventor 谭久彬胡鹏程陈鹏
Owner HARBIN INST OF TECH
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