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Light path compensation based laser heterodyne interference measurement method and light path compensation based laser heterodyne interference measurement device

A technology of laser heterodyne interferometry and measurement devices, which is applied in the field of laser applications, can solve problems such as measurement speed limitations, and achieve the effects of simplified design, reduced cost, and high resolution

Active Publication Date: 2013-01-09
HARBIN INST OF TECH
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Problems solved by technology

[0008] Aiming at the defects of the above-mentioned existing laser heterodyne interferometer, the present invention proposes a laser heterodyne interferometry method and device based on optical path compensation, which improves the measurement accuracy of laser heterodyne interferometry and solves the limitation of the measurement speed by the frequency difference of the laser light source. question

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  • Light path compensation based laser heterodyne interference measurement method and light path compensation based laser heterodyne interference measurement device

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Embodiment Construction

[0035] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0036] A high-speed ultra-precision laser heterodyne interferometry device based on optical path compensation, the device includes a frequency-stabilized laser 1, a beam splitter 2, a polarization beam splitter 5, a measuring prism 6, a quarter-wave plate 7, and a measuring plane mirror 8 , photodetector A9, photodetector B10, the device also includes reflective prism 3, reference prism 4, phase meter A11, phase meter B12, switch circuit 13, measurement circuit 14, wherein, beam splitter 2 is located at the output of frequency stabilized laser 1 end; reflective prism 3 is located in the reflection direction of beam splitter 2, reference prism 4 is located in the reflection direction of reflective prism 3; polarizing beam splitter 5 is located in the transmission direction of beam splitter 2; measuring prism 6 is located in the reflection direction of pol...

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Abstract

The invention relates to a light path compensation based laser heterodyne interference measurement method and a light path compensation based laser heterodyne interference measurement device, belonging to the technical field of laser application. The invention adopts reference light and measurement light which are spatially separated from each other, and a light path compensation design is carried out; meanwhile, the method generates two interference measurement signals with opposite Doppler frequency shifts, and selectively uses the two measurement signals for carrying out interference measurement according to the movement direction and speed of a measured target. The method and the device provided by the invention not only reduces the influence of temperature change on the measurement, but also eliminates the frequency aliasing phenomenon in an interferometer, thus improving the measurement accuracy of heterodyne interference measurement; and furthermore, the problem of the limitation of laser source frequency difference to the measurement speed can be solved.

Description

technical field [0001] The invention belongs to the technical field of laser applications, and mainly relates to a laser heterodyne interferometry method and device based on optical path compensation. Background technique [0002] Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy and production efficiency; at the same time, new challenges are raised for the measurement accuracy, resolution and speed of heterodyne interferometry. [0003] In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abroad have done a lot of...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 谭久彬刁晓飞胡鹏程杨千惠白洋
Owner HARBIN INST OF TECH
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