Micromechanical sensor with three-layer substrate

Abstract

The invention discloses a micro mechanical sensor with three layers of base plates, and belongs to the technical field of micro mechanical sensors. The sensor comprises the three layers of base plates made of monocrystalline silicon wafers, the three layers of base plates and a cavity structure are utilized for forming a unique path for gas circulation. The micro mechanical sensor has the advantages that an MEMS (micro-electromechanical system) processing process is adopted, the size of the sensor is reduced, and the micro mechanical sensor can be used for measuring precipitation particles.

Description

technical field [0001] The invention discloses a micromechanical sensor with a three-layer substrate, which belongs to the technical field of micromechanical sensors. Background technique [0002] Measuring precipitation is an important part of meteorological measurements. Traditional methods of measuring precipitation mainly use tipping bucket or cylinder rain gauges. However, there is a wetting error in the traditional rain gauge. When there are only a few precipitation particles, the wetting error may make the instrument unable to detect the precipitation particles. At the same time, traditional rain gauges cannot measure the mass of raindrops, nor can they distinguish raindrops from hail. [0003] The current raindrop spectrometer based on the principle of optical scattering can measure the quality of raindrops and avoid infiltration errors. However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatibl...

AI Technical Summary

Problems solved by technology

However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatible with microelectronics processes

Instruments based on optical principles are also easily affected by the surrounding environment, such as dust blocking the lens, which will affect the measurement

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