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Preparation method of flexible anti-drag skin of micro-electromechanical system (MEMS)

A flexible and skinning technology, applied in the manufacture of microstructure devices, processes for producing decorative surface effects, decorative arts, etc., can solve problems such as unfavorable large-scale manufacturing, structural damage to the flexible surface layer 16, and reduce proficiency requirements. , the effect of improving the yield

Inactive Publication Date: 2014-04-30
TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This preparation method greatly broadens the selection range of the flexible surface material and overcomes the shortcomings of the ZL201110192799.5 preparation method. The flexible surface layer 16 of the pit 164 is released from the mold. The manual method currently available not only has high requirements for the operator to ensure the integrity of the structure of the micro-pits 164, but is not conducive to large-scale manufacturing, and it is easy to make the flexible surface layer 16. The structure of the superficial layer 16 is damaged

Method used

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  • Preparation method of flexible anti-drag skin of micro-electromechanical system (MEMS)
  • Preparation method of flexible anti-drag skin of micro-electromechanical system (MEMS)
  • Preparation method of flexible anti-drag skin of micro-electromechanical system (MEMS)

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Embodiment Construction

[0028] The preparation method of the flexible MEMS drag-reducing skin provided by the present invention will be further described in detail below in conjunction with specific embodiments and accompanying drawings.

[0029] Please also refer to Figure 2 to Figure 10 , a method for preparing a flexible MEMS drag-reducing skin 1, comprising:

[0030] S1, providing a substrate 2;

[0031] S2, forming a flexible substrate 12 on the base 2;

[0032] S3, preparing a patterned electrode 14 on the flexible substrate, the patterned electrode 14 comprising a plurality of electrolytic anodes and electrolytic cathodes arranged in a staggered manner;

[0033] S4, on the flexible substrate 12 and the patterned electrode 14, prepare a micro-protrusion column array 161 with photoresist;

[0034] S5, filling the first prepolymer into the gaps of the protrusions 162 of the micro protrusion array 161, and curing the first prepolymer 166 after the first prepolymer 166 is filled, and the first ...

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Abstract

The invention discloses a preparation method of a flexible anti-drag skin of a micro-electromechanical system (MEMS). The method comprises the following steps: providing a substrate; forming a flexible substrate on the base; preparing a patterned electrode on the flexible substrate, wherein the patterned electrode comprises a plurality of electrolytic anodes and electrolytic cathodes, which are arranged in a staggered manner; preparing micro convex column arrays on the flexible substrate and the patterned electrode by using a photoresist; filling first pre-polymer into a convex column gap of the micro convex column arrays; solidifying the first pre-polymer after the first pre-polymer is filled; polymerizing into a first polymer from the first pre-polymer, so as to obtain a flexible surface layer; removing the micro convex column arrays by using an etching technology, so that the patterned electrode at the bottom of the convex column is exposed, and meanwhile, a micro-concave pit array is formed; stripping the base, so as to obtain the flexible anti-drag skin of the MEMS.

Description

technical field [0001] The invention relates to the technical field of micro-manufacturing, in particular to a method for preparing a flexible MEMS (Micro Electro-Mechanical System) drag-reducing skin. Background technique [0002] During the driving process of underwater vehicles, they will be affected by travel resistance, which includes pressure difference resistance, traveling wave resistance and surface friction resistance, among which surface friction occupies a large proportion, especially for slender vehicles. Therefore, reducing the surface friction of the vehicle can effectively increase the speed, increase the voyage, and reduce energy consumption, which has great practical value. At present, research on drag reduction technology for frictional resistance mainly focuses on turbulent boundary layers, including passive drag reduction methods such as surface topography drag reduction (such as rib drag reduction), bionic drag reduction (such as compliant wall drag red...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 李勇周凯佟浩
Owner TSINGHUA UNIV
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