Photodetector with spatial modulation structure and its preparation method

Abstract

The invention relates to an optical fiber communication system, optical interconnection and a photoelectric detector, and in order to provide the photoelectric detector which is high in PN-joint photodiode responsibility, wide in intrinsic bandwidth, and capable of achieving full differential output and to improve the overall performance of a standard CMOS technological monolithic integration photo receiver, the photoelectric detector of a spatial modulation structure is characterized in that a shallow groove separation area is manufactured on a P-type substrate, photodiodes and shading diodes are arrayed in the shallow groove separation area at intervals, the photodiodes are formed by N-type well regions with medium dosage concentration and the P-type substrate, the shading diodes are formed by N-type well regions with medium dosage concentration, the P-type substrate and a second interconnected metal layer, N-type well contact areas with heavy dosing are sequentially arranged on the N-type well regions with the medium dosage concentration, and P-type substrate contact areas with heavy dosing are arranged on the periphery of the N-type well regions with the medium dosage concentration. A preparation method of the photoelectric detector is mainly applied to design and manufacturing of photoelectric detectors.

Description

technical field [0001] The invention relates to an optical fiber communication system, an optical interconnection and a photodetector, in particular to a photodetector with a space modulation structure and a preparation method thereof. Background technique [0002] With the wide application of information and communication technology and the continuous emergence of various new services, user terminals have increasing requirements for network bandwidth. Traditional electrical interconnection networks are limited by RC delay, and it is difficult to further expand the frequency band. Therefore, using high-speed, high-capacity optical communication and optical interconnection to improve network performance has become an important research topic at present. As a key device in the field of optical communication and optical interconnection, the quality of photodetectors has a decisive impact on the performance of the entire system. [0003] At present, most of the receivers used i...

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Problems solved by technology

However, the above-mentioned detector is a pseudo-differential structure, which cannot realize full differential signal output

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