Plasma discharge machining device and machining method for tiny holes
A plasma and electrical discharge machining technology, which is applied in plasma welding equipment, metal processing equipment, manufacturing tools, etc.
Inactive Publication Date: 2017-02-15
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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[0005] In order to solve the problems that the existing micro-hole machining method cannot completely avoid the surface / sub-surface damage of parts, and the existing plasma discharge machining technology is not suitable for micro-hole machining, etc., the present invention proposes a micro-hole plasma discharge machining device and processing method
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[0017] 1. Specific implementation mode one: if figure 1 , figure 2 As shown, the micropore plasma discharge machining device of this embodiment includes a helium gas cylinder (1), a carbon tetrafluoride gas cylinder (2), an oxygen cylinder (3), a helium mass flow controller (4), a tetrafluorocarbon Carbon dioxide mass flow controller (5), oxygen mass flow controller (6), gas mixing valve (7), radio frequency power supply (8), impedance matching device (9), electrode (10), upper guide (11) , air chamber (12), worktable (14), motion control system (15), lower guide (16), base (17), grounding wire (18), grounding jacket (22), radio frequency power supply (8) The electrode (10) is connected through the impedance matching device (9), the grounding wire (18) is connected with the grounding jacket (22), the radio frequency power supply (8), the impedance matching device (9), the electrode (10) and the workpiece (13) , grounding wire (18), grounding jacket (22) constitute the plasm...
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The invention relates to a plasma electro-discharge machining device and a plasma electro-discharge machining method of micro holes and belongs to the technical field of mechanical manufacturing. The problems that the existing micro-hole machining method can hardly completely avoid the surface and subsurface damage, and the existing plasma nondestructive machining device is not suitable for ultra-precise and efficient machining of the micro holes and the like can be solved. A small-diameter linear electrode is fixed in the to-be-machined hole center through guiding devices, plasma electro-discharge space is formed between the electrode and the hole wall, a radio frequency power supply is connected with the electrode through an impedance matcher, working gas enters a gas chamber after corresponding quality flow controllers control the flow, and a grounded jacket is arranged inside a worktable and is grounded. The method comprises the following steps of placing a workpiece which is grounded, positioning the electrode, inletting the gas, adjusting the flow, inputting and adjusting the power, controlling the motion trace and the staying time, turning off the power and the gas, and taking the workpiece out. The plasma electro-discharge machining device is suitable for the plasma electro-discharge machining for the micro holes.
Description
technical field [0001] The invention belongs to the field of mechanical manufacturing, and relates to a plasma discharge machining device and a machining method for tiny holes. Background technique [0002] With the development of science and technology, tiny holes with a diameter of less than 1 mm have appeared in various fields of our lives, ranging from cutting-edge parts in aviation, aerospace, military, etc. to circuit boards, spinnerets, models, fuel injection, etc. Mouths, moulds, medical and sanitary appliances, clocks and other civil parts, tiny holes are everywhere. Micro hole machining is one of the most difficult processing techniques in hole machining: First, due to the extremely small hole diameter, almost all micro hole machining is deep holes with a large aspect ratio; secondly, the parts materials that need to process micro holes are generally mostly High-strength, high-hardness difficult-to-machine materials, such as heat-resistant steel, stainless steel, ...
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IPC IPC(8): B23P17/02
CPCB23K10/00
Inventor 张巨帆李兵王颖党炜
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL