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Preparation method of metal oxide-porous nano films (MO-PNFs)

A nanostructure and oxide technology, applied in nanotechnology, metal material coating process, ion implantation plating, etc., can solve the problems of complex process, easy to damage porous structure, pore size, distribution and area limitation, etc. Good uniformity, easy operation and good controllability

Inactive Publication Date: 2014-06-18
CHANGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the process of template method is complicated. In addition to template preparation and thin film deposition, heat treatment or solvent dissolution is usually required to remove the template, which is easy to destroy the porous structure, and the size, distribution and area of ​​the pores are limited by the template.
The dealloying method is a popular preparation method for porous materials at present, but it is more suitable for the corrosion of thick alloy strips (above the micron level), and generally obtains a three-dimensional or block bicontinuous porous structure. There are great limitations in the potential application of large-scale integrated circuits and nano-devices
Moreover, the dealloying method is generally used to prepare porous metals, and no one has been found to use the dealloying method to prepare porous metal oxides.

Method used

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  • Preparation method of metal oxide-porous nano films (MO-PNFs)
  • Preparation method of metal oxide-porous nano films (MO-PNFs)
  • Preparation method of metal oxide-porous nano films (MO-PNFs)

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] 1) Using the JGP500A magnetron co-sputtering coating system, first fix the clean 321 stainless steel substrate on the sample plate, and then install the Cu target with a purity of 99.99% and the Al target with a purity of 99.9% respectively on the RF source and the On the DC source, and adjust the distance between the substrate and the two targets to be 15cm;

[0028] 2) Close the chamber door and evacuate to 4.5×10 -4 Pa, then the high-purity Ar gas with a flow rate of 20sccm and a purity of 99.999%, and keep the chamber pressure at 0.1pa;

[0029] 3) Simultaneously sputter the Cu target and the Al target with the power of RF200W and DC60W, respectively. After pre-sputtering for 30 minutes, adjust the rotation speed of the sample plate to 2r / min, remove the baffle and start depositing the Cu-Al alloy film at room temperature. The deposition time is 1h;

[0030] 4) The Cu-Al alloy film obtained by co-sputtering was directly corroded in 10mmol / L NaOH aqueous solution f...

Embodiment 2

[0032] 1) Same as embodiment 1;

[0033] 2) Same as embodiment 1;

[0034] 3) Same as embodiment 1;

[0035] 4) Alloy thin film at 7×10 -4 Annealed in Pa high vacuum for 30min, the annealing temperature is 400 ° C;

[0036] 5) The annealed Cu-Al alloy thin film was placed in 10mmol / L NaOH aqueous solution to corrode freely for 24h, then the sample was taken out, rinsed repeatedly with deionized water for more than 3 times and dried in the air. The product is similar to Example 1, which is a porous nanostructured film composed of many nanosheets. However, the surface of these nanosheets is rough and loose, and is composed of some nanoparticles of about 20nm; the nanopores are smaller, about 60nm.

Embodiment 3

[0038] 1) Same as embodiment 1;

[0039] 2) Same as embodiment 1;

[0040] 3) Same as embodiment 1;

[0041] 4) The annealing temperature is 600 ° C, all the other are with embodiment 2;

[0042] 5) Same as embodiment 2. The morphology of the obtained CuO product is as follows Figure 5 As shown, the product presents a typical "nanoparticle-nanohole" structure, and the size of both the nanoparticle and the nanohole is about 30 nm.

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Abstract

The invention discloses a preparation method of metal oxide-porous nano films (MO-PNFs), and relates to the technical field of preparation of porous films. The preparation method comprises the following steps: firstly, depositing stainless steel-based metal-aluminum alloy films at a room temperature by adopting a magnetron co-sputtering film-coating technology; then carrying out annealing treatment under high vacuum; finally, placing in NaOH liquor to carry out corrosion to remove a relatively active aluminum component, and forming a primary battery by utilizing a stainless steel substrate and relatively inert metal components or semi-oxidized products thereof to further oxidize metal components and form the MO-PNFs by self-assembling. According to the invention, a corrosion process of alloy films is controlled by controlling constituent elements of the alloy films, an annealing temperature as well as parameters such as concentration of the NaOH liquor, so that the MO-PNFs with different metal oxides, nano structures and porosities can be controlled. Besides, the preparation method has the advantages of being simple in process, large in area, good in uniformity, good in controllability, and the like, and has wide potential application prospect in the fields of catalysts, sensors, and the like.

Description

technical field [0001] The invention relates to the technical field of preparation of porous films, in particular to a method for preparing metal oxide porous nanostructure films through oxidation-assisted dealloying (OAD) treatment. Background technique [0002] Porous nanostructure-films (PNFs) are functional films with a porous structure assembled from low-dimensional nanostructures such as nanoparticles, nanopillars / rods, nanoligaments, nanosheets, nanopores or nanotubes. . Due to the high porosity and large specific surface area of ​​PNFs, as well as the significant small size effect and nano-curvature effect of the low-dimensional nanostructure itself, PNFs exhibit many unique physical, chemical and mechanical properties that are different from traditional bulk materials. It has broad potential application prospects in many fields such as catalysts, sensors, fuel cells, solar cells, and electrodes. At present, the preparation methods of PNFs mainly include the templa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/58C23F1/34C23F1/40C23F1/36B82Y40/00
Inventor 苏江滨蒋美萍王红红刘阳
Owner CHANGZHOU UNIV