Optical parameter detecting method for Si-based buffer layer coated glass

Abstract

The invention relates to an optical parameter detecting method for Si-based buffer layer coated glass, and belongs to the field of coated glass detecting. A buffer layer coating film is made of SiCxOy, wherein x is larger than 0 but smaller than 1, and y is larger than 1 but smaller than 4. According to the method, on the basis of obtaining an elliptic polarization spectrum of the SiCxOy buffer layer coated glass, a three-layer film layer structure and an optical dispersion equation are introduced, the elliptic polarization spectrum is actually detected through the iteration in a regression mode, a film layer structure of the SiCxOy coated glass and optical parameters of all layers of the film layer structure are obtained lastly, and the optical performance of the coated glass is monitored on line according to the method. According to the method, the film layer structure and the optical parameters of a thin film can be accurately obtained according to the elliptic polarization optical testing means, a sample is not damaged, time for measurement is short, the measuring method is simple and convenient to conduct, the special requirement for the surface of a measured sample does not exist, and the method is very suitable for detecting and monitoring performance of the energy-saving SiCxOy coated glass.

Description

technical field [0001] The invention relates to a method for detecting optical parameters of Si-based buffer layer coated glass and belongs to the field of coated glass detection. Background technique [0002] The buffer layer film is a transition film between the target functional film and the substrate, and often plays an important role as a bridge in the multilayer film system, such as eliminating the lattice mismatch between the target functional film and the substrate, blocking Diffusion of harmful elements in the substrate to the target functional thin film, optimization of the optical properties of the overall film system, etc. Amorphous SiC x o y The buffer layer film is a kind of buffer layer film widely used in transparent conductive oxide film systems. It has excellent structural compatibility with glass substrates and most oxide films, and its amorphous material structure also makes it have Good barrier properties, more importantly, SiC can be prepared by atmo...

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Problems solved by technology

[0003] However, when using SiC x o y When the Si-based buffer layer is used as the buffer layer between the float glass and the transparent conductive oxide film, since the Si-based buffer layer film is very similar to the substrate glass in terms of composition and optical parameters, it is difficult to accurately obtain the Si-based buffer layer by conventional optical measurement methods. The fine structure of the thin film and its optical parameters make it difficult to design and optimize the optical properties of the overall film system

Although the method of obtaining the optical parameters of the film based on the fitting of the transmission and reflection spectra (ZL200610053955.9, a method for measuring the optical parameters of the coated glass film) preliminarily solved the problem of rapid detection of the optical parameters of the Si-based coated glass, but this invention combines Si The coated glass is assumed to be treated with a layer of homogeneous and flat film, which is inconsistent with the actual situation, so there is still a certain deviation in the detection

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