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Offline machine use ratio calculation system and method

A computing system and computing method technology, applied in the direction of comprehensive factory control, electrical components, comprehensive factory control, etc., can solve problems such as inconvenient analysis and allocation of resources by engineers, inaccurate statistics on machine usage, and untimely switching of machine states. , to achieve the effect of automatic calculation, solving inaccuracy and reducing waste

Active Publication Date: 2014-06-25
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology

However, often due to the long time of measuring / sweeping goods or other objective reasons, the assistant engineer does not switch the status of the machine in time, or forgets to switch, etc., which leads to inaccurate statistics on the use of the machine, and has a negative impact on the analysis and allocation of resources by the engineer. caused great inconvenience and resulted in an extreme waste of manpower

Method used

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  • Offline machine use ratio calculation system and method
  • Offline machine use ratio calculation system and method
  • Offline machine use ratio calculation system and method

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Embodiment Construction

[0022] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.

[0023] figure 1 It is a block diagram of an off-line machine utilization calculation system according to an embodiment of the present invention. Such as figure 1 As shown, the computing system includes a computer terminal file generating unit 11 , an analyzing unit 12 , a database 13 and a computing unit 14 . Wherein, the machine-side file generating unit 11 is used to generate machine-side files according to predetermined naming rules, and the analyzing unit 12 is connected with the machine-side file generating unit 11 for analyzing the file names of each machin...

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Abstract

The invention discloses an offline machine use ratio calculation system. The offline machine use ratio calculation system comprises a machine end file generation unit, an analysis unit, a database and a calculation unit. The machine end file generation unit is used for generating machine end files according to a preset naming rule. The analysis unit is used for analyzing the file names of machine end files so as to extract run parameter information of offline machines for processing each wafer. The database is used for storing run readiness time of each offline machine and run time functions related to run parameters of the offline machines for processing the wafers. The calculation unit is used for calculating the run time of each wafer according to the running parameter information of the offline machines for processing each wafer and the run time functions, and obtaining the total run time of the offline machines for processing all the wafers and the use ratio of the offline machines according to all the run time and all the run readiness time. The invention further provides an offline machine use ratio calculation method, and statistics can be effectively carried out on the real use condition of the offline machines.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing technology, in particular to a calculation system and a calculation method for the utilization rate of offline machines in semiconductor equipment. Background technique [0002] With the development of semiconductor manufacturing technology and the continuous improvement of process automation, the calculation of the production utilization rate of online machines such as online process machines and measuring machines is becoming more and more accurate. However, there are still certain problems in semiconductor process production plants. Type and quantity of offline machines. Commonly used offline machines include scanning electron microscope inspection machines, optical inspection machines, ion beam cutting machines, and particle inspection machines. For the calculation of the production utilization rate of the online machine, due to its online characteristics, the data of the machi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418H01L21/67
CPCY02P90/02
Inventor 范荣伟龚丹莉刘飞珏陈宏璘龙吟
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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