Ingotting furnace for polycrystalline silicon and quasi single crystal silicon and application method for ingotting furnace
A quasi-single-crystal silicon and polysilicon technology, which is applied to polysilicon and quasi-single-crystal silicon ingot furnaces and their application fields, can solve the problems of large loss of graphite heaters, short replacement cycle, poor temperature control accuracy, etc., and achieve less heat loss. , The effect of coil arrangement optimization and high safety factor
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[0021] The present invention will be further described below in conjunction with the drawings and embodiments.
[0022] figure 1 It is a schematic diagram of the structure of the polycrystalline silicon and quasi-single crystal silicon ingot furnace of the present invention.
[0023] See figure 1 , The polycrystalline silicon and quasi-single crystal silicon ingot furnace provided by the present invention includes a quartz crucible 1, wherein a first induction heater 2 is provided on the outside of the quartz crucible 1, a second induction heater 3 is provided at the bottom, and a second induction heater 3 is provided at the top. The third induction heater 4, the quartz crucible 1 is provided with a graphite crucible 5 as structural strength protection, a heat insulation layer 6 is provided between the quartz crucible 1 and the graphite crucible 5, and the first induction heater 2 surrounds Set on the outside of the graphite crucible 5.
[0024] The polysilicon and quasi-single crys...
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