Device and method for surface modification of micro-nano particles

A technology of micro-nano particles and surface modification, which is applied in the direction of nanotechnology, nanotechnology, nanotechnology, etc. for materials and surface science. It can solve the problem that the advantages of high uniformity of atomic layer deposition cannot be fully utilized and the precursors are not fully utilized. , Powder particles are difficult to disperse and other problems, to achieve the effect of promoting sufficient and uniform adsorption, improving deposition uniformity and adequacy, and increasing the area

Active Publication Date: 2014-09-17
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] At present, the existing equipment or methods for surface modification of powder particles mainly adopt the fluidization method. However, since the atomic layer deposition technology is rooted in the traditional planar thin film growth technology, the applicability of the existing devices and methods for the surface deposition of micro-nano particles is still limited. It needs to be further improved, mainly because there is a significant difference compared with the flat substrate deposition process, and the powder particles are difficult to disperse due to agglomeration during the deposition process, which causes the advantages of high uniformity of atomic layer deposition to not be fully utilized in particle surface coating , the coating efficiency is low, and the precursor utilization may not be sufficient

Method used

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  • Device and method for surface modification of micro-nano particles
  • Device and method for surface modification of micro-nano particles
  • Device and method for surface modification of micro-nano particles

Examples

Experimental program
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Effect test

Embodiment 1

[0082] For AlH with a particle size of 50 μm 3 The particle surface is coated with a layer of 10nm thick Al 2 o 3 Thin film to reduce its impact sensitivity and improve safety. Select trimethylaluminum (TMA) and water (H 2 O) is a precursor, its main anti The response equation is:

[0083] (A)AlOH * +Al(CH 3 ) 3 →AlOAl(CH 3 ) 2 * +CH 4

[0084] (B)AlCH 3 * +H 2 O→AlOH * +CH 4

[0085] Using the above-mentioned micro-nanoparticle surface modification device and the corresponding pressure-packed deposition process method:

[0086] 0.1g AlH 3 Put the particles into the powder particle loading device and install it in the reaction chamber, and connect it with the magnetic fluid sealing device. The reaction chamber is then sealed.

[0087] Turn on the vacuum pump, open the solenoid valve and the throttle valve to connect the reaction chamber with the vacuum pump, and pump the pressure of the reaction chamber to less than or equal to 1pa. Heat the reaction c...

Embodiment 2

[0091] For SiO with a particle size of 200nm 2 The particle surface is coated with a layer of 5nm thick Al 2 o 3 thin films to study SiO 2 The surface structure of the particles. Select trimethylaluminum (TMA) and water (H 2 17 O) is the precursor.

[0092] Using the above-mentioned micro-nano particle surface modification device and the corresponding equilibrium dispersion deposition process method:

[0093] SiO 2 Put the particles into the powder particle loading device and install it in the reaction chamber, and connect it with the magnetic fluid sealing device. The reaction chamber is then sealed.

[0094] Turn on the vacuum pump, open the solenoid valve and the throttle valve to connect the reaction chamber with the vacuum pump, and pump the pressure of the reaction chamber to less than or equal to 1pa. Heating the reaction chamber to stabilize the internal temperature at 200°C, and heating the precursor steel cylinder, precursor branch pipeline, and precursor qu...

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Abstract

The invention discloses a device for surface modification of micro-nano particles. The device comprises a reaction cavity, a plurality of precursor supply devices, a carrier gas conveying system and a powder particle loading device, wherein a cavity formed inside the reaction cavity is used as a reaction space of precursors and the micro-nano particles; the plurality of precursor supply devices are respectively communicated with the reaction cavity by virtue of pipelines to provide different precursors; the precursors are conveyed to the reaction cavity by virtue of carrier gas output by the carrier gas conveying system; the powder particle loading device is used for loading the micro-nano particles to be modified; the precursors are alternately conveyed to the reaction cavity by virtue of the plurality of precursor supply devices respectively, and enter the rotary powder particle loading device so as to be in contact with the surfaces of the micro-nano particles to perform an atomic layer deposition reaction, thus forming a coating thin film on the surfaces of the micro-nano particles and realizing surface modification. The invention also discloses a method for performing surface modification on the micro-nano particles by using the device. The device and method disclosed by the invention can be used for obtaining a coating layer with high particle surface uniformity and improving the overall coating rate of the powder particles and the utilization rate of the precursors.

Description

technical field [0001] The invention belongs to the technical field of powder particle surface coating, and in particular relates to a device and method for surface modification of micro-nano particles. Background technique [0002] Compared with bulk materials, powder granular materials have large specific surface area and high surface activity, and have small size effect, surface effect and quantum tunneling effect that traditional solid materials do not have, which triggers changes in structure and energy state, and can produce many Unique physical and chemical properties such as light, heat, electricity, magnetism, mechanics, and catalysis. [0003] Due to its huge specific surface area, its excellent performance can be further expanded and improved through appropriate surface modification. The main method of surface modification of micro-nanoparticles is to coat a film on the surface of the particles as needed to form a core-shell structure. Such a structure can make ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455B82Y40/00B82Y30/00
Inventor 陈蓉段晨龙刘潇曹坤单斌文艳伟
Owner HUAZHONG UNIV OF SCI & TECH
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