Self-adaptive common-light-path grating interferometer and realizing method thereof

A technology of grating interference and common optical path, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problems of not adopting a complete common optical path interferometer design and the inability to eliminate the influence of optical path, and achieve the elimination of motion errors, high precision and resolution rate effect

Active Publication Date: 2014-09-17
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

However, the technical solutions represented by the above all have the following problems: no real complete common optical path interferometer desig...

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  • Self-adaptive common-light-path grating interferometer and realizing method thereof
  • Self-adaptive common-light-path grating interferometer and realizing method thereof
  • Self-adaptive common-light-path grating interferometer and realizing method thereof

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Embodiment Construction

[0031] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0032] 1. Embodiment 1. Such as figure 1 .

[0033] The laser 8 emits linearly polarized light, which is divided into P light and S light by the first polarizing beam splitter 7, and enters the diffraction grating 1 through the mirror 3 and the mirror 4 respectively, and is diffracted by the diffraction grating 1 (set as ±1-order light The direction of the two diffracted lights of ) is perpendicular to the diffraction grating 1, and after being reflected by the corner cube prism 2, the P light and the S light respectively enter the respective optical paths of the other party (S light and P light), forming a complete common optical path, and then pass through the first polarization Beam splitter 7 emerges as orthogonal linearly polarized light, which enters the dotted line...

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Abstract

A self-adaptive common-light-path grating interferometer comprises grating rulers which relatively move, a cube-corner prism, a reflector, a transmitting and reflecting mirror, a position sensitive detector, a polarization beam splitter, a linear polarization light source, a PZT micrometric displacement driver, a data collecting and processing and controlling unit and a polarization phase shift interference photoelectric detection unit or a double-frequency heterodyne interference photoelectric detection unit, wherein the PZT micrometric displacement driver is used for driving the cube-corner prism, the reflector and the transmitting and reflecting mirror. The self-adaptive method based on the diffraction light spot position feedback control cube-corner prism or the reflector is adopted to guarantee the complete common light path character of the dynamic grating interferometer, light path influence caused by relative movement errors of the grating rulers is eliminated, and high precision and high resolution ratio are obtained.

Description

technical field [0001] The invention relates to an optical measuring instrument, in particular to an adaptive common optical path grating interferometer and its realization method. Background technique [0002] The grating interferometer is the core of the high-precision grating ruler measurement system (the grating pitch is generally less than 10 microns), which determines its accuracy and resolution. The high-precision grating ruler measurement system consists of a grating ruler body, a mounting fixture, a reading head based on a grating interferometer, a signal controller and a display, and its function is to measure high-precision displacement. Widely used in machine tool processing control, wafer processing and cutting, integrated circuit lithography equipment, semiconductor testing, robot systems, aerospace, scientific research, military and other fields. [0003] The high-precision grating ruler measurement system is not only one of the most basic modern automatic me...

Claims

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Application Information

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IPC IPC(8): G01B9/02
Inventor 韦春龙周常河向显嵩卢炎聪
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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