A kind of preparation method and application of oxide film material with shape memory effect

Abstract

A method of preparing an oxide film material with shape memory effects comprises steps: the pulse laser deposition technology is used for preparing a two-phase-coexistence BiFeO3 film on a high-quality mismatch single-crystal substrate; and a focusing ion beam etching technology is used for preparing a pure-phase nano structure on the two-phase-coexistence BiFeO3 film prepared in the former step. The invention also discloses the application of the film nano structure. The method and the application of the invention have the effects that a ferroelectric oxide material with huge shape memory effects is successfully prepared by using the epitaxial growth technology and the focusing ion beam etching technology. An electric field, the temperature and the stress can all have effects on the shape memory strain of the material, and the maximal reversible strain can be as high as 14%. As regulation on the shape memory effects of the material can also be realized by the electric field, the working frequency is higher than that of the traditional alloy material, and in addition, as the shape strain is realized in the nano scale, the material can replace the traditional alloy material to be applied to sensing, driving and the like in the small size.

Description

technical field [0001] The invention relates to the field of oxide thin film materials, in particular to a preparation method and application of an oxide thin film material with shape memory effect. Background technique [0002] Ferroic materials usually refer to functional material systems with order parameters such as ferroelectricity, ferroelasticity, and ferromagnetism, including ferroelectric / piezoelectric, magnetostrictive materials, and shape memory alloys. They have great application potential in many functional structures and devices such as sensing actuation, etc. Piezoelectric materials such as (1-x)[Pb(Mg 1 / 3 Nb 2 / 3 )O 3 ]-x[PbTiO 3 ] usually exhibit a high mechanical response under an electric field and can be used for actuators or sensors (Fuetal., Nature403,281(2000); Liuetal., Phys.Rev.Lett.103,257602(2009); Kutnjak et al., Nature441 , 956(2006)). In these functional applications, mechanical strain often plays a crucial role. However, a maximum electri...

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Problems solved by technology

[0006] Due to BiFeO 3 It is a ferroelectric material, can it be regulated by electric field instead of temperature? In order to achieve the shape memory effect, the current shape memory alloys are all under the action of temperature, stress, and magnetic field to achieve recoverable strain, which will inevitably increase the working cycle of materials and devices, which is not conducive to the application of devices at higher response frequencies.

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