Crucible with impurity-discharge function and applied in polysilicon purification or ingot casting link, and polysilicon purification or ingot casting method

A polysilicon and ingot casting technology, which is applied in the growth of polycrystalline materials, chemical instruments and methods, crystal growth, etc., can solve the problems that the amount of equipment transformation is not easy to realize, increase the cost of production and operation, and affect the utilization rate of silicon ingots, etc. The effect of overall utilization rate, strong applicability and easy method

Inactive Publication Date: 2014-11-05
DALIAN UNIV OF TECH
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  • Application Information

AI Technical Summary

Problems solved by technology

When polysilicon is in a liquid state, the top silicon material is an impurity-intensive area. After the silicon ingot is solidified and formed, the impurities will diffuse from the top high-concentration area to the bottom concentration area, thereby affecting the utilization rate of the silicon ingot.
The usual method is to use a professional cutting machine to cut off the high impurity area on the top after the silicon ingot is formed. It also increases, and the utilization rate decreases accordingly; 2. Professional equipment is required to remove the high-concentration area of ​​top impurities, which increases production and operation costs; 3. At this stage, there are also methods to remove liquid top impurities, but the large amount of equipment transformation is not easy to achieve

Method used

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  • Crucible with impurity-discharge function and applied in polysilicon purification or ingot casting link, and polysilicon purification or ingot casting method
  • Crucible with impurity-discharge function and applied in polysilicon purification or ingot casting link, and polysilicon purification or ingot casting method
  • Crucible with impurity-discharge function and applied in polysilicon purification or ingot casting link, and polysilicon purification or ingot casting method

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specific example

[0040] like figure 1 , 2 , 3: Take GT DSS450 as an example, the ingot weight is 450Kg, and the crucible size is 840mm×840mm×420mm; ρ 液 =2.42g / cm 3 , ρ 固 =2.33 g / cm 3 .

[0041] The liquid level height H of polysilicon in liquid state in the crucible 液 =V 液 / S 底 =M / ρ 液 / S 底 =263mm

[0042] After the polysilicon is crystallized in the crucible, the height H is cast 固 =V 固 / S 底 =M / ρ 固 / S 底 =273mm

[0043] The height H=H of the bottom edge of the overflow hole 7 from the inside of the crucible 2 液 +(H 固 -H 液 ) 20%, that is, the bottom edge of the overflow hole 7 is 265 mm from the inner bottom surface of the crucible 2 . When the silicon material is completely melted, the liquid level reaches 263mm, and when the bottom begins to grow oriented crystals, the liquid level will gradually rise. When reaching the drilling position of 265mm, the silicon liquid flows into the collection tank 8 through the overflow hole 7. The height of the overflow hole 7 can be adjust...

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Abstract

The invention relates to a crucible with an impurity-discharge function, which is applied in a polysilicon purification or ingot casting link. The crucible comprises a columnar crucible body. Overflow holes are arranged on a side wall of the crucible body. A collection tank is arranged on the outer side of the crucible body and below the overflow holes. The height H from the bottom edges of the overflow holes to the inner bottom side of the crucible body equals H liquid+(H solid-H liquid)20%, wherein H liquid is the liquid level of liquid-state polysilicon in the crucible body, and H solid is the height of crystallized polysilicon in the crucible body. The method has the following steps: a polysilicon material is added into the crucible body; the crucible body is mounted in a furnace, and vacuum pre-pumping is carried out; first-stage heating is carried out, and polysilicon is completely molten; crystal growth is carried out; annealing is carried out, such that internal stress in the crystals is eliminated; cooling is carried out, wherein the polysilicon ingot is cooled to a temperature of 400 DEG C with the furnace; the ingot is fetched from the furnace and is cooled to room temperature; the silicon ingot is fetched; and overflown silicon material is collected. During an operation process, a top-layer impurity-rich zone is removed under a liquid state, such that impurity-rich zone reverse osmosis after the silicon ingot is formed is reduced, and silicon ingot overall utilization rate is improved.

Description

technical field [0001] The invention relates to a crucible used in polycrystalline silicon purification or ingot casting and a method for purifying polycrystalline silicon or ingot casting using the crucible. Background technique [0002] At present, the devices used in polysilicon ingot casting include crucibles. Most of the crucibles are in the shape of a cuboid, that is, a box surrounded by four sides and a bottom surface. On the graphite base, a program-controlled heating element is arranged around the crucible in the furnace body. The polysilicon material turns into a liquid when heated, and then crystallizes to form an ingot. When polysilicon is in a liquid state, the top silicon material is an impurity-intensive area. After the silicon ingot is solidified and formed, the impurities will diffuse from the top high-concentration area to the bottom concentration area, thereby affecting the utilization rate of the silicon ingot. The usual method is to use a professional ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B28/06C30B29/06
Inventor 谭毅林海洋温书涛石爽姜大川
Owner DALIAN UNIV OF TECH
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