Three-dimensional all-solid-state mini thin-film lithium battery with inverted pyramid array structure

Abstract

The invention discloses a three-dimensional all-solid-state mini thin-film lithium battery with an inverted pyramid array structure, and relates to lithium batteries. The three-dimensional all-solid-state mini thin-film lithium battery is provided with a substrate, an insulation film, a cathode current collector, a lower anode current collector, a cathode film, a solid electrolyte film, an anode film and an upper anode current collector, wherein the insulation film is arranged on the substrate; the cathode current collector and the lower anode current collector are arranged on the insulation film; the cathode film is arranged on the cathode current collector; the solid electrolyte film covers the cathode film; the anode film is arranged on the solid electrolyte film; the upper anode current collector is arranged on the anode film and the lower anode current collector. Based on the anisotropic etching of a silicon substrate, the inverted pyramid array structure is precisely manufactured and applied to the all-solid-state mini thin-film lithium battery, so that the capacity of active substances in unit standing area is improved and the contact between the thin films is tight. According to the unique design of a mask, the upper and lower circuits are guided to a same plane, so that the space utilization rate and the structure stability of the mini battery are effectively improved.

Description

technical field [0001] The invention relates to a lithium battery, in particular to a three-dimensional all-solid micro thin-film lithium battery adopting an inverted pyramid array structure. Background technique [0002] Today, with the rapid development of micro-electromechanical systems (MEMS), external power supplies can no longer meet the growing demands for miniaturization and integration. Micro-thin-film lithium batteries stand out among micro-energy sources due to their size flexibility, safety, and high energy density. However, most of the existing all-solid-state thin-film lithium batteries are limited to two-dimensional planes ([1] K.F.Chiu, C.C.Chen, K.M.Lin, H.C.Lin, C.C.Lo, W.H.Ho, C.S. Jiang, Vacuum, 84 (2010) 1296 -1301; [2] J.F. Whitacre, W.C. West, B.V. Ratnakumar, J Electrochem Soc, 150 (2003) A1676; [3] B.J. Neudecker, N.J. Dudney, J.B. Bates, J Electrochem Soc, 147 (2000) 517-523), The space utilization rate is low. Even the existing three-dimensional ...

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Problems solved by technology

However, most of the existing all-solid-state thin-film lithium batteries are limited to two-dimensional planes ([1] K.F.Chiu, C.C.Chen, K.M.Lin, H.C.Lin, C.C.Lo, W.H.Ho, C.S. Jiang, Vacuum, 84 (2010) 1296 -1301; [2] J.F. Whitacre, W.C. West, B.V. Ratnakumar, J Electrochem Soc, 150 (2003) A1676; [3] B.J. Neudecker, N.J. Dudney, J.B. Bates, J Electrochem Soc, 147 (2000) 517-523), The space utilization rate is low. Even the existing three-dimensional thin film lithium battery usually has a complex structure and high process requirements ([4] L. Baggetto, R.A.H. Niessen, F. Roozeboom, P. H. L. Notten, Adv Funct Mater, 18 (2008) 1057 -1066; [5] L.Baggetto, H.C.M.Knoops, R.A.H.Niessen, W.M.M.Kessels, P.H.L.Notten, J MaterChem, 20 (2010) 3703), most of the rectangular or columnar three-dimensional structure ([6] M.Kotobuki, Y .Suzuki, H.Munakata, K.Kanamura, Y.Sato, K.Yamamoto, T.Yoshida, J Electrochem Soc, 157(2010) A493; [7] D.Golodnitsky, V.Yufit, M.Nathan, I. Shechtman, T.Ripenbein, E.Strauss, S.Menkin, E.Peled, J Power Sources, 153 (2006) 281-287), it is not easy to combine with microelectronic technology, often only a single electrode or need to add electrolyte ([8 ] K. Yoshima, H. Munakata, K. Kanamura, J Power Sources, 208 (2012) 404-408; [9] T. Ripenbein, D. Golodnitsky, M. Nathan, E. Peled, Electrochimica Acta, 56 (2010 )37-41), so there is no real miniaturization and solidification of the full battery, and few researchers consider the planar design of the circuit, and package the upper circuit lead of the thin film battery to the base surface

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