Apparatus of rapidly transmitting large-scale pallet in vacuum environment and application method thereof

Abstract

The invention relates to an apparatus of rapidly transmitting large-scale pallet in vacuum environment and an application method thereof. The apparatus comprises: a pallet made of graphite materials with an area larger than 1 m<2> and a mechanical arm used for transmitting the pallet in the vacuum environment. A plurality of supporting pieces for bearing the pallet are arranged on the upper surface of the mechanical arm. The apparatus is characterized in that, contact materials are arranged between the supporting pieces and the pallet, and the supporting pieces indirectly bear the pallet through the contact materials. According to the invention, through the method of arranging the contact materials between the supporting pieces of the mechanical arm and the pallet, a frictional force between the pallet and the support pieces is increased, relative motion between the pallet and the support pieces is prevented, hence transmission speed of the large-scale pallet in the vacuum environment is increased.

Description

technical field [0001] The invention relates to a transport device in a vacuum environment, in particular to a device capable of rapidly transporting large trays in a vacuum environment and a method for using the same. technical background [0002] In large-scale industrial production of semiconductors, solar cells, and flat panel displays, in order to expand production capacity and process more silicon wafer substrates at one time, people usually use large-size (greater than 1m 2 ) pallets, and graphite materials are mostly used as materials for making pallets, mainly because graphite has a series of advantages such as good thermal conductivity, low expansion coefficient, high temperature resistance, good corrosion resistance and chemical stability, and graphite materials It is easy to machine, and the cost of using graphite materials is relatively low. However, due to the self-lubricating properties of graphite itself, after repeated actions between the graphite tray and ...

AI Technical Summary

Problems solved by technology

However, due to the self-lubricating properties of graphite itself, after repeated actions between the graphite tray and the transfer robot arm, the surface of the tray that was originally not smooth is ground, resulting in a reduction in the friction between the two contact surfaces, so that the graphite tray and the robot arm are smooth. It is very likely that there will be relative movement between them, and the rapid transmission of the pallet cannot be realized, which ultimately reduces the production capacity of the equipment

On the other hand, during the interaction between the graphite tray and the two contact surfaces of the mechanical arm, a large number of particles will also be generated, and these particles are likely to fall into the vacuum transmission chamber, causing certain pollution to the chamber environment. At the same time, These particles are also likely to be transported into the vacuum coating chamber, thereby changing the film deposition conditions in the vacuum coating chamber, resulting in changes in the electrical properties of the film, and ultimately affecting the film formation quality of the vacuum coating chamber

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