Sub-boiling distillation method for high-purity hydrochloric acid

A high-purity hydrochloric acid, sub-boiling distillation technology, applied in the field of sub-boiling distillation of high-purity hydrochloric acid, can solve the problem of slow distillation rate and other issues

Active Publication Date: 2014-12-10
太仓中化环保化工有限公司
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0005] Other related technologies such as: CN102874757A discloses a preparation method of high-purity hydrochloric acid, using industrial hydrochloric acid as a raw material, and preparing high-purity hydrochloric acid that meets HG/T2778-2009 industry standards through evaporation, ultrafiltration, absorption, sub-boiling distillation and other processes. Pure hydrochloric acid; Henan Chemical Industry [2010, 27 (7), 61-62] through the process improvement of industrial hydrochloric acid preparation equipment, the concentration o

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  • Sub-boiling distillation method for high-purity hydrochloric acid
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  • Sub-boiling distillation method for high-purity hydrochloric acid

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Embodiment 1～7

[0031] The raw material hydrochloric acid adopts the hydrochloric acid from the fluorocarbon alkane production plant, the still body 7 internal diameter D=500mm of the distiller that adopts, the height H=800mm of the heating jacket 8, the surface area of ​​the inner side wall of the still body 7 is S=1.256m 2 , the surface area of ​​the inner wall of the still body 7 is the evaporation area. Relevant process parameters are controlled. After a fraction is produced, the collected liquid for the first 2 hours is collected separately, and the subsequent one is used as a formal product. The relevant implementation data are shown in Table 1 below:

[0032] Table 1

[0033]

[0034] As can be seen from the data in the above table, heating temperature, condensation temperature, circulation all have greater influence on the quality and the flow rate of product hydrochloric acid, operate within the implementation process parameter of the present invention, can satisfy hydrochloric a...

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Abstract

The invention relates to a sub-boiling distillation method for high-purity hydrochloric acid. The sub-boiling distillation method comprises the following steps: taking hydrochloric acid from a fluorocarbon alkane production device as a raw material, carrying out membrane type distillation operation in a determined sub-boiling distillation device, controlling process parameters such as a preheating temperature, a heating temperature, a condensing temperature and a circulating flow rate to prepare the high-purity hydrochloric acid with concentration greater than 35.0% and metal ion content smaller than 1ppb, wherein indexes of the metal ions satisfy Semi-C8 standards proposed by the Semiconductor Equipment and Material International). The sub-boiling distillation method can be used for solving a problem of removing metal ions in super clean high-purity hydrochloric acid, and also can be used for effectively improving the distillation rate at the same time.

Description

technical field [0001] The invention relates to a sub-boiling distillation method of high-purity hydrochloric acid. Background technique [0002] Ultra-clean and high-purity reagents (Process Chemicals) are one of the key basic chemical materials in the microelectronics industry, especially in the production process of ultra-large-scale integrated circuits. They are mainly used for chip cleaning and corrosion. Yield, electrical performance and reliability all have a very important impact. Ultra-clean high-purity hydrochloric acid is one of the most demanding ultra-clean reagents and a product with high added value. [0003] The purification technologies of ultra-clean and high-purity reagents include the following: distillation and rectification, isothermal distillation, subboiling distillation, vacuum distillation, sublimation, chemical treatment technology, gas absorption technology, particle control technology, etc. The control indicators of ultra-clean and high-purity ...

Claims

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Application Information

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IPC IPC(8): C01B7/07
Inventor 张超潘亚妮王祎铖郑尧波黄金硕纪敏李月刚王童
Owner 太仓中化环保化工有限公司
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