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Flexible substrate and preparation method and application thereof

A flexible substrate and substrate technology, applied in the field of flexible substrate preparation, can solve the problems of poor thermal stability and high water and oxygen permeability, and achieve the effect of simple process, wide source of materials, and blocking water and oxygen penetration

Inactive Publication Date: 2014-12-17
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, polymer films also have some disadvantages, such as poor thermal stability and high permeability to water and oxygen.

Method used

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  • Flexible substrate and preparation method and application thereof
  • Flexible substrate and preparation method and application thereof

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preparation example Construction

[0028] A method for preparing a flexible substrate, comprising the following steps:

[0029] S10, to provide polymer film substrates, put the polymer film substrates into the vacuum coating system, at a vacuum degree of 10 -3 Pa~10 -5 Under the condition of Pa, the first metal aluminum layer is prepared by evaporating on one side of the polymer film substrate;

[0030] S20, then alternately vapor-depositing a second metal aluminum layer and a polyimide film layer on the other side of the polymer film substrate, and the two ends of the polymer film substrate have a metal aluminum layer structure;

[0031] Evaporated metal aluminum layer in a vacuum of 1 × 10 -3 ~1×10 -5 It is carried out in the vacuum coating system of Pa, and the evaporation rate is 0.2nm / s~2nm / s.

[0032] Evaporated polyimide film layer in a vacuum of 1 × 10 -3 ~1×10 -5 It is carried out in a vacuum coating system of Pa, and the evaporation rate is 0.1nm / s~1nm / s.

[0033] Polyimide film is prepared by ...

Embodiment 1

[0046] The fabrication steps of the flexible substrate include the following:

[0047] Step 1: Provide a polymer film substrate PET film with a thickness of 1mm and clean it;

[0048] Step 2: In a vacuum of 1 x 10 -5 In Pa's vacuum coating system, the first metal aluminum layer is prepared by evaporation on the first surface of the PET film of the polymer film substrate, with a thickness of 50nm and an evaporation rate of 0.5nm / s;

[0049] Step 3: In a vacuum of 1 x 10 -5 In the vacuum coating system of Pa, on the basis of step 2, on the other surface of the PET film of the polymer film substrate, evaporation prepares the second metal aluminum layer, and then the surface evaporation of the second metal aluminum layer prepares the polyimide film layer, successively Alternately repeat the preparation of the second metal aluminum layer and the polyimide film layer, the number of polyimide layers is 3 layers, the number of layers of the second metal aluminum layer is 4 layers, a...

Embodiment 2

[0059] The preparation of this flexible conductive electrode follows the following method:

[0060] Step 1: Provide a polymer film substrate PI film with a thickness of 0.1mm and clean it;

[0061] Step 2: In a vacuum of 1 x 10 -3 In the vacuum coating system of Pa, on one surface of the polymer film substrate PI, the first metal aluminum layer is prepared by evaporation, the thickness is 100nm, and the evaporation rate is 0.2nm / s;

[0062] Step 3: In a vacuum of 1 x 10 -3 In the vacuum coating system of Pa, on the basis of step 2, on the other surface of the polymer film substrate PI film, the second metal aluminum layer is prepared by evaporation, and then the polyimide film is prepared by evaporation on the surface of the second metal aluminum layer Layers, alternately and repeatedly prepare the second metal aluminum layer and the polyimide film layer, the number of polyimide layers is 2 layers, the number of layers of the second metal aluminum layer is 3 layers, and the ...

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Abstract

A flexible substrate comprises a thin polymer film substrate, a first metal aluminum layer is arranged on one surface of the thin polymer film substrate, a second metal aluminum and a thin polyimide film layer are alternatively arranged on the other surface of the thin polymer film substrate, the two ends of the thin polymer film substrate are provided with metal aluminum layer structures, and the material of the thin polymer film substrate is selected from at least one of polyethylene terephthalate, polyether sulfone, polyethylene naphthalate and transparent polyimide. The flexible substrate has low water oxygen permeability. The invention also provides a preparation method and an application of the flexible substrate.

Description

technical field [0001] The invention relates to a flexible substrate, a preparation method thereof, an organic electroluminescent device using the substrate and a preparation method thereof. Background technique [0002] Organic electroluminescent devices (OLEDs) usually use ultra-thin glass, polymer films, metal sheets, etc. as flexible substrates, which have the advantages of being thinner and more impact-resistant than glass substrates, and the preparation of flexible devices can be done by roll-to-roll Roll production, thereby greatly reducing manufacturing costs. [0003] As a commonly used flexible substrate, polymer film is widely used in the preparation process of various flexible devices due to its wide source, low price and good flexural performance. However, polymer films also have some disadvantages, such as poor thermal stability and high permeability to water and oxygen. Contents of the invention [0004] Based on this, it is necessary to provide a flexible...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/52H01L51/54H01L51/56
CPCH10K77/111H10K50/00H10K2102/311Y02E10/549
Inventor 周明杰冯小明张振华王平
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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