LED substrate structure and manufacturing method thereof
A technology of substrate structure and fabrication method, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of high cost, insufficient luminous brightness, easy to crack, etc., to reduce invisible costs, avoid technical bottlenecks, and achieve low-cost solutions. Effect
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Embodiment 1
[0056] Please refer to figure 1 , which is a schematic flow chart of the manufacturing method of the LED substrate structure according to Embodiment 1 of the present invention. Such as figure 1 As shown, the manufacturing method of the LED substrate structure includes:
[0057] Step S10: providing a substrate;
[0058] Step S11: etching the substrate to form convex structures arranged in a periodic array on the first surface of the substrate;
[0059] Step S12: forming a DBR film system on the first surface of the substrate between the outer wall of the convex structure and the convex structure, wherein the substrate between the top wall of the convex structure and the convex structure is first The DBR film on the surface is provided with an array of nano-windows exposing portions of the top walls of the convex structures and the first surface of the substrate between the convex structures.
[0060] Specifically, please refer to Figure 2 ~ Figure 1 2. It is a schematic c...
Embodiment 2
[0081] Please refer to Figure 13 , which is a schematic flow chart of the manufacturing method of the LED substrate structure according to the second embodiment of the present invention. Such as Figure 13 As shown, the manufacturing method of the LED substrate structure includes:
[0082] Step S30: providing a substrate;
[0083] Step S31: etching the substrate to form concave structures arranged in a periodic array on the first surface of the substrate;
[0084] Step S32: forming a DBR film system on the first surface of the substrate between the inner wall of the concave structure and the concave structure, wherein the substrate between the bottom wall of the concave structure and the concave structure is first The DBR film system on the surface is provided with a nano-window array, and the nano-window array exposes part of the bottom wall of the concave structure and the first surface of the substrate between the concave structures.
[0085] Specifically, please refer...
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