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Gas laser amplifying system with MOPA structure

A technology of gas lasers and amplification systems, applied in lasers, laser parts, phonon exciters, etc., can solve the problems of low output stability, difficult adjustment of optical path, and difficult processing, etc., and achieve low difficulty in optical path adjustment and high output Effects of stabilization, cost reduction and maintenance cost

Active Publication Date: 2014-12-24
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the output stability of the existing MOPA structure gas laser amplification system is not high, the cost of components is high, the processing difficulty is large, and the optical path is not easy to adjust.

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  • Gas laser amplifying system with MOPA structure
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  • Gas laser amplifying system with MOPA structure

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0025] Aiming at the advantages and disadvantages of the existing technical solutions, the invention proposes an improved laser amplification system adopting MOPA structure.

[0026] figure 2 It is an optical path diagram of an embodiment of the MOPA structure gas laser amplifying system adopting four times amplifying technology of the present invention. like figure 2 As shown, the gas laser amplification system of this embodiment includes a main oscillator cavity MO, a power amplification cavity PA, a line width narrowing module LNM, an output coupler 1, a first mirror 4 and a second mirror 5, and It includes a cylindrical mirror 2 , a concave mirror 3 , and a third reflector 6 and a fourth reflector 7 . Each reflec...

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Abstract

The invention discloses a gas laser amplifying system with an MOPA structure. The gas laser amplifying system comprises a master oscillator (MO), a power amplifier (PA), a line width narrowing module (LNM), an output coupler (1), a first reflecting mirror (4) and a second reflecting mirror (5), and further comprises a third reflecting mirror (6) and a fourth reflecting mirror (7). Seed light output through the output coupler (1) from the master oscillator (MO) is reflected by the first reflecting mirror (4) and the second reflecting mirror (5) into the power amplifier (PA); the third reflecting mirror (6) and the fourth reflecting mirror (7) are located at the two ends of the exterior of the power amplifier (PA) respectively, and the reflecting face of the third reflecting mirror (6) and the reflecting face of the fourth reflecting mirror (7) are perpendicular to the length direction of the power amplifier (PA); the seed light entering the power amplifier (PA) is reflected between the third reflecting mirror (6) and the fourth reflecting mirror (7) multiple times and output from a notch of the third reflecting mirror (6). The gas laser amplifying system is stable in performance and low in cost, and light paths are easily adjusted.

Description

technical field [0001] The invention relates to a gas laser amplification system adopting MOPA structure, especially suitable for excimer laser. Background technique [0002] Excimer laser has the characteristics of short wavelength and high power, making it the main light source for large-scale semiconductor integrated circuit lithography. With the increase of light source output power and linewidth requirements for lithography, single-cavity excimer lasers cannot meet the requirements of high power and narrow linewidth at the same time. The emergence of the dual-cavity main vibration-oscillation amplification technology has solved the contradiction that high output power and narrow line width cannot be achieved at the same time. The basic idea is to use the seed laser to generate small-energy and narrow-linewidth seed light, inject it into the amplification cavity for energy amplification, and output high-energy pulsed laser light, thereby obtaining a high-quality laser b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/082
Inventor 沙鹏飞单耀莹丁金滨赵江山彭卓君宋兴亮李慧鲍洋周翊王宇
Owner RAINBOW SOURCE LASER RSLASER
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