Semiconductor device and method of manufacture thereof
A manufacturing method and semiconductor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, identification devices, etc., can solve the problems of reduced aperture ratio, increased power consumption, and increased backlight brightness, achieving high aperture ratio, sufficient The effect of reliability, ease of manufacture
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[0047] Hereinafter, a semiconductor device according to an embodiment of the present invention will be described with reference to the drawings. The semiconductor device of this embodiment includes a thin film transistor (oxide semiconductor TFT) having an active layer made of an oxide semiconductor. In addition, the semiconductor device according to the present embodiment may broadly include active matrix substrates, various display devices, electronic equipment, and the like as long as it includes an oxide semiconductor TFT.
[0048] Here, a TFT substrate including an oxide semiconductor TFT used in a liquid crystal display device will be described as an example.
[0049] figure 1 It is a schematic plan view of TFT substrate 100A of this embodiment. figure 2 (a) is a schematic plan view of one pixel in the TFT substrate 100A, figure 2 (b) is along figure 2 (a) Schematic cross-sectional view of A1-A1' line. image 3 (a) is figure 1 A schematic enlarged plan view of p...
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