Krypton, xenon gas purification method and device

Abstract

The invention discloses a krypton-xenon gas purification method and device. The problems that gas production indexes of existing krypton-xenon gas purification cannot reach the standard, the equipment is short in service life and is inconvenient to overhaul and the like are solved. According to the technical scheme, the krypton-xenon gas purification device comprises a first-stage reaction tube and a second-stage reaction tube, which are connected in series, wherein the first-stage reaction tube and the second-stage reaction tube are arranged in a heater; and the outlet of the second-stage reaction tube is sequentially connected with a hydrogen adsorber, a cooler and a precise filter. The krypton-xenon gas purification device is simple in structure, easy to dismantle, low in loss, simple and convenient to maintain, and low in operation cost; the gas purification meets the 2006-edition new national standards of krypton and xenon; the system is stable; and the equipment is long in service life.

Description

technical field [0001] The invention relates to a gas purification method and device, in particular to a krypton and xenon gas purification method and device. Background technique [0002] Aiming at the problem that the 1995 national standards for krypton and xenon could not satisfy the high-end photoelectric market and the development of modern science and technology, WISCO Oxygen Company was entrusted by the National Gas Standards Committee, as the first drafting unit and the first drafter presided over the revision of the national standard "Krypton Gas" (GB / T5829-2006) and "Xenon" (GB / T5828-2006). Compared with the old national standards for krypton and xenon in 1995, the 2006 version of the new national standard for krypton and xenon has stricter quality requirements for products, adding new control standards for impurities such as hydrocarbons, carbon monoxide, carbon dioxide and fluorocarbons, and improving Control standards for impurities such as oxygen and nitrogen ...

AI Technical Summary

Problems solved by technology

Judging from the disintegrated reaction tube after the failure, the alloy getter in the upper part of the first stage of the reaction section on the intake side is seriously melted, and the alloy getter and the stainless steel screen layer in the middle are almost completely blocked by crystal particles such as zirconium fluoride, resulting in The air flow is not smooth during operation, and the resistance increases sharply. The getter alloy material in the lower part of the first stage of reaction can still be used, but the U-shaped tube will still be forced to be replaced

[0012] In fact, even when the alloy getter in the first-stage reaction section on the inlet side of the U-shaped tube fails and is blocked, the alloy getter in the second-stage reaction section has not failed, but because the U-shaped tube is connected as a whole, it can only The overall replacement leads to insufficient utilization of the expensive getter, and the life of the U-shaped tube is only 3 to 6 months

[0013] Moreover, the fluorocarbons in krypton and xenon react with the getter filled in the reaction section under high-temperature environment to form reactants such as gaseous zirconium fluoride, and the krypton-xenon gas flowing out of the purification device exchanges heat with the external environment along the subsequent pipeline , the temperature gradually decreases. When the temperature is lower than 750°C, zirconium fluoride will crystallize and become a granular solid, which will block the pipelines and valves of the subsequent process, causing abnormal wear of the valve core. It must be stopped for maintenance and replacement frequently, which will affect the normal operation of the system.

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