Adjusting method for vacuum ultraviolet plane grating dispersion spectrograph
A technology of vacuum ultraviolet light and planar grating, which is applied in the field of spectroscopy, can solve the problems of difficult and precise adjustment, decreased accuracy of installation and adjustment, and high cost of installation and adjustment, and achieve the effects of high precision, low cost, and less labor time consumption
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[0015] The implementation of the method of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0016] Such as figure 1 As shown, the vacuum ultraviolet grating 12 - 4 is replaced by a plane mirror 3 in the spectrometer 12 , and the spectrometer 12 is irradiated by the collimated light emitted by the Zygo interferometer 1 . First adjust the telescope 12-1 in the spectrometer 12, the slit 12-2 and the collimating mirror 12-3, so that the outgoing light of the collimating mirror 12-3 is a collimated light; then adjust the plane mirror 3 to follow the collimated light along the original optical path Return to Zygo Interferometer 1. The computer control processing system 2 is connected with the Zygo interferometer 1 to observe the wave aberration and fine-tune the front-end optical components, and obtain the optimal wave aberration image of the system through the computer control processing system 2 to complete the insta...
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