A methane sensor based on flip-chip packaging and its preparation method and application

Abstract

A flip-chip packaging-based miniature methane sensor and a manufacturing method therefor. For the methane sensor, first, a MEMS process is employed for processing and manufacturing a monolithic high-temperature heater (1), a monolithic methane gas detector (2), and an ambient temperature detector (3), and then the monolithic high-temperature heater (1) and the monolithic methane gas detector (2) are formed into one integral miniature methane sensor in the form of a laminated structure by means of a flip-chip packaging process. The monolithic high-temperature heater (1) is independently heated to a high temperature of 500 °C or more. The monolithic methane gas detector (2) independently detects a temperature drop caused by the emergence of methane and by a change in concentration. A measuring circuit of the detector and a circuit of the monolithic high-temperature heater (1) are independent of each other and do not affect each other. The manufacturing process for the sensor is compatible with a CMOS process and has a low power consumption, high sensitivity, and extended service life.

Description

technical field [0001] The invention relates to a methane sensor and a preparation method thereof, in particular to a flip-chip packaged methane sensor suitable for use in industrial and mining networking, a preparation method and application thereof. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost. At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines, which consumes a lot of power, especially the use of catalysts leads to shortcomings such as unstable methane detection performance and short calibration time; and The infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; neither of these two methane sensors ...

AI Technical Summary

Problems solved by technology

[0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost

At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines, which consumes a lot of power, especially the use of catalysts leads to shortcomings such as unstable methane detection performance and short calibration time; The infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; neither of these two methane sensors can well meet the application requirements of the Internet of Things for low-power methane sensors

Other methane sensors cannot adapt to the high humidity environment in coal mines

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