Differential vibration isolation type MEMS (micro-electromechanical system) vector hydrophone

A vector hydrophone and vibration isolation technology, which is applied to instruments, measuring devices, and measuring ultrasonic/sonic/infrasonic waves, etc. It can solve the problems that specific elastic elements can only be applied to specific frequency bands, complex processing technology, and low reliability. Achieve the effects of easy fabrication and mass production, high structural reliability, and simple manufacturing process

Active Publication Date: 2015-02-18
ZHONGBEI UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a differential vibration isolation solution in order to solve the problems of complex MEMS processing technology, structural stability and low reliability of the existing vector hydrophone vibration reduction structure, and specific elastic elements can only be applied to specific frequency bands. Type MEMS vector hydrophone

Method used

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  • Differential vibration isolation type MEMS (micro-electromechanical system) vector hydrophone
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  • Differential vibration isolation type MEMS (micro-electromechanical system) vector hydrophone

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Embodiment Construction

[0029] like Figure 1 to Figure 3 As shown, a differential vibration isolation type MEMS vector hydrophone includes a silicon base frame 1, a cantilever beam 2 and a central connecting body 3 suspended at the center of the silicon base frame 1 through the cantilever beam 2, and the silicon base Both the frame 1 and the central connecting body 3 have a square structure, and the four sides of the central connecting body 3 are respectively fixed to the four frames of the silicon base frame 1 by a cantilever beam 2; the root and end of each cantilever beam 2 are respectively A piezoresistor 6 is integrated, that is, eight piezoresistors 6 R1, R2, R3, R4, R5, R6, R7, R8 are arranged on the four cantilever beams 2, and the resistance values ​​of the eight piezoresistors 6 are all equal ; Wherein, four piezoresistors 6 R1, R2, R3, R4 on the two cantilever beams 2 in the X direction form a Wheatstone bridge for measuring the underwater acoustic signal in the X direction, and the two c...

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Abstract

The invention discloses a differential vibration isolation type MEMS (micro-electromechanical system) vector hydrophone and solves the problems of the conventional elastic vibration isolation structure that sound scatters, amplitude decreasing only works on special frequency band noise and structure is poor in stability and reliability. The differential vibration isolation type MEMS vector hydrophone comprises a silicon base frame, cantilevers, a central connector, an upper minitype cylinder and a lower minitype cylinder. The minitype cylinders are bonded symmetrically. Eight strain varistors are formed on each cross cantilever. During operation, vibration of a platform acts on the minitype cylinders in the inertia force manner, and the minitype cylinders generate equal and reversed torques; a voice signal generates a different-mode signal through a sealing structure and acts the minitype cylinders, and the minitype cylinders generate different-mode torques. Based on the common-mode rejection characteristic and the different-mode output characteristic, vibration is damped. The different vibration isolation type MEMS vector hydrophone is simple and reliable in structure, effective in damping and unaffected by vibration sources and vibration frequency.

Description

technical field [0001] The invention relates to the technical field of MEMS vector hydrophones, in particular to a sensitive structure of MEMS vector hydrophones with differential effects. Background technique [0002] Vector hydrophone, as a sensor capable of measuring the vector information of underwater sound field with time synchronization and space co-point, has a wide application prospect in ocean engineering and ocean development. The application of MEMS vector hydrophones has greatly improved the acquisition technology of underwater sound information. However, due to its complex working environment and various installation platforms, vibration and noise will be transmitted to sensitive units along the supporting structure, seriously affecting the accuracy of measurement results. , sensitivity, etc. Existing MEMS vector hydrophones mainly use elastic element isolation for vibration reduction. For example, a Chinese invention patent with the patent number CN2010105822...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H11/06
Inventor 张国军王续博郭静简泽明刘源郭楠刘梦然张文栋
Owner ZHONGBEI UNIV
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