Carbon-nano-tube-array-based flexible infrared sensor and manufacturing method thereof
A technology of carbon nanotube arrays and infrared sensors, which is applied in the direction of electric radiation detectors, etc., to achieve the effects of extremely low power consumption, low manufacturing cost, and convenient application
Active Publication Date: 2015-02-18
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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At present, carbon nanotubes or carbon nanotube composites have been used as sensitive materials to prepare infrared sensors. However, since the sensor is used to test the resistance change of carbon nanotubes under infrared irradiation, it is necessary to apply an external voltage to both ends of the carbon nanotubes. or current source to measure
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[0038] The present invention also provides a method for preparing a flexible infrared sensor based on a carbon nanotube array, comprising the following steps:
[0039] Step 1: using polymethyl methacrylate (PMMA) as a solute and anisole as a solvent to prepare an anisole solution of polymethyl methacrylate with a mass concentration of 0.08g / mL;
[0040] Step 2: Prepare P-type carbon nanotube arrays: wash the silicon dioxide substrate 3 times in acetone and alcohol respectively, and dry it with nitrogen for later use; then use ferrocene as the solute and toluene as the solvent to prepare a mass fraction of 3 % ferrocene toluene solution as a precursor solution; put the above-mentioned cleaned and dried silicon dioxide substrate into a tube furnace, and put the tube under an argon atmosphere with a purity of 99.999% by volume percentage within 30 min. The temperature in the tube furnace was raised from room temperature to 850°C, and then the above-prepared precursor solution was...
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The invention provides a carbon-nano-tube-array-based flexible infrared sensor and a manufacturing method of the carbon-nano-tube-array-based flexible infrared sensor, and belongs to the field of flexible infrared sensor manufacturing. The carbon-nano-tube-array-based flexible infrared sensor comprises a substrate and an infrared sensitive material located on the substrate. The infrared sensitive material is a P-N joint formed by a P-type carbon nano tube array and an N-type carbon nano tube array, and electrodes are arranged on the P-type carbon nano tube array and the N-type carbon nano tube array respectively. According to the carbon-nano-tube-array-based flexible infrared sensor and the manufacturing method, the P-N joint formed by the P-type carbon nano tube array and the N-type carbon nano tube array is adopted for the flexible infrared sensor to serve as the infrared sensitive material, when a device is irradiated by the infrared light, infrared response can be represented by testing the P-N joint open-circuit voltage, the power consumption is lowered, no voltage source meter or current source meter needs to be used, and the flexible infrared sensor is convenient to use and capable of being bent repeatedly without affecting the performance of the device and has good stability.
Description
technical field [0001] The invention belongs to the field of synthesis of carbon nanomaterials and preparation of flexible infrared sensors, and in particular relates to a flexible infrared sensor based on carbon nanotube arrays and a preparation method thereof. Background technique [0002] Infrared sensors are now widely used in non-invasive blood glucose monitoring, heart rate monitoring, smart home control, and infrared imaging. At present, with the widespread use of more and more wearable or windable devices, the demand for bendable sensors is becoming more and more urgent, and the research on flexible sensors has attracted more and more attention from researchers. Compared with traditional infrared sensors, flexible infrared sensors not only require infrared sensitive materials to have good infrared response, but more importantly, the materials used in flexible infrared sensors need to maintain good performance in a bent state. [0003] Carbon nanotubes are one-dimens...
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IPC IPC(8): G01J5/22
Inventor 林媛黄振龙高敏伍博潘泰松
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA