Three-dimensional atom probe sample preparation first stage polishing equipment

Abstract

The invention discloses a three-dimensional atom probe sample preparation first-stage polishing device. The three-dimensional atom probe sample preparation first-stage polishing device comprises a base, a supporting plate, a liner plate, an eccentric wheel, a first lever, a second lever, a connecting rod, a fixed plate, a stand column, a motor and a bolt. By adopting the polishing device, the manual polishing process is changed to the mechanical polishing process, so that the manpower is saved, and the precision is improved. The rotation of the motor is converted to the up-down movement through the levers and the eccentric wheel, and the application requirement can be met. By adopting the polishing device, the spatial position of the preparation of samples in different sizes can be adjusted, and the flexibility is strong. By adopting the aluminum alloy material, the weight is reduced, and the cost is reduced. The polishing device is electrified to execute the electrochemical polishing, so that the polishing size is fixed, the precision is high, the sample quality is good, the taper is large, and convenience in observation of the three-dimensional atom probe and data acquisition can be realized. A simple mechanical device capable of rapidly preparing a sample is provided for preparing a three-dimensional atom probe metal sample.

Description

technical field [0001] The invention belongs to equipment for preparing characterization material samples, in particular to a first-stage polishing equipment for three-dimensional atom probe sample preparation. Background technique [0002] The 3D atom probe is a measurement and analysis method with atomic-level spatial resolution. Based on the principle of "field evaporation", the three-dimensional atom probe applies a strong voltage pulse or laser pulse to the sample, turning its surface atoms into ions one by one, and removes and collects them. This requires that the sample needs to be made into a needle tip with a diameter of several microns before it can be analyzed in the 3D atom probe. In the first stage of sample preparation, the rod-shaped sample needs to be roughly polished with a polishing solution to make a relatively thin needle tip. , and then to the second stage of polishing under the microscope. [0003] For the preparation of traditional metal samples, man...

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Problems solved by technology

[0003] For the preparation of traditional metal samples, manual sample preparation is often adopted in the first stage, that is, direct manual polishing up and down in the polishing solution. The disadvantages are: waste of manpower, low accuracy, and easy to cause sample contamination

[0004] Patent CN 102915900 A discloses a "focused ion beam device", which can accurately prepare samples for three-dimensional atom probes, but the operation of the equipment is complicated and difficult, and it takes a long time to prepare samples, and the equipment is expensive and costly

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