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Method for manufacturing X-ray planar detector, and TFT array substrate for X-ray planar detector

A flat-panel detector and array substrate technology, applied in semiconductor/solid-state device testing/measurement, semiconductor devices, electric solid-state devices, etc.

Active Publication Date: 2015-03-04
CANON ELECTRON TUBES & DEVICES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when imaging the lungs, for example, an area of ​​approximately 40 cm x 40 cm is imaged, and therefore optics to gather light are necessary, and the device is undesirably large

Method used

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  • Method for manufacturing X-ray planar detector, and TFT array substrate for X-ray planar detector
  • Method for manufacturing X-ray planar detector, and TFT array substrate for X-ray planar detector
  • Method for manufacturing X-ray planar detector, and TFT array substrate for X-ray planar detector

Examples

Experimental program
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Embodiment

[0033] Example description

[0034] An X-ray flat panel detector TFT array according to several embodiments will now be described with reference to the accompanying drawings. The same or similar configurations can be denoted by the same reference numerals, and repeated descriptions are omitted.

no. 1 example

[0035] [first embodiment] figure 1 is a schematic perspective view of the X-ray flat panel detector according to the first embodiment. figure 2 is a circuit diagram of the X-ray flat panel detector according to this embodiment. image 3 is a partially enlarged view of the TFT array according to this embodiment. Figure 4 is a circuit diagram of the amplifier circuit of the X-ray flat panel detector according to this embodiment.

[0036] The X-ray flat panel detector 10 includes a plurality of pixels 20 arranged two-dimensionally. These pixels 20 are arranged in an array configuration having longitudinal and lateral sides of several hundred to several thousand pixels 20 each. The pixels 20 arranged in an array configuration on the glass substrate 11 are referred to as a TFT array 21 . Each pixel 20 includes a thin film transistor (TFT: Thin Film Transistor) 41 as a switching element, a photoelectric conversion film (PD: Photodiode 42 ), and a capacitor 43 . Instead of pro...

no. 2 example

[0074] [Second embodiment] Image 6 is a schematic circuit diagram of the TFT array substrate of the X-ray flat panel detector according to the second embodiment.

[0075] In the X-ray flat panel detector TFT array substrate 30 of the present embodiment, an external voltage application pad 33 is added to the X-ray flat panel detector TFT array substrate 30 of the first embodiment (see Figure 5 ). In this embodiment, the external voltage application pads 33 are provided not only at two positions on the positions on both sides of the common interconnection ring 32 and the protection diode 34 on the one pad 27 side of the signal line 53, but also At two positions on both sides of the connection unit of the common interconnection ring 32 and the protection diode 34 provided on one side of the connection pad 23 serving as the signal line 53 and the signal processing circuit 48 (see figure 1 ) connection unit.

[0076] In the inspection, a prescribed reference bias voltage is ap...

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PUM

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Abstract

A common interconnect ring is provided at a periphery of a portion used to form a TFT array of an X-ray flat panel detector, and an X-ray flat panel detector TFT array substrate connected to signal lines and scanning lines via pairs of two protection diodes connected in parallel and having mutually-reverse polarities is manufactured. When inspecting the X-ray flat panel detector TFT array substrate, the same reference bias voltage as the amplifier of a detection circuit is applied from an external voltage application pad provided at the vicinity of a connection unit for the common interconnect ring and the protection diodes on the same side of the signal lines, a signal is provided to a scanning line connection pad to switch the thin film transistor ON, and an electrical signal flowing through the signal line is read from a signal line connection pad.

Description

technical field [0001] Embodiments of the present invention relate to a method of manufacturing an X-ray flat panel detector and a TFT array substrate of the X-ray flat panel detector. Background technique [0002] In recent years, in the medical field, it is common for patients to use a plurality of medical institutions. In this case, there is a possibility that accurate treatment cannot be performed without data of other medical institutions. Therefore, there is a move towards making a database of patient medical data in order to perform treatments quickly and accurately. [0003] It is desirable to also make a database for image data of X-ray imaging. Therefore, it is desirable to digitize X-ray imaging images. In medical X-ray diagnostic equipment, conventionally, imaging has been performed using silver halide thin films. In order to digitize image data imaged on a silver halide film, the imaged film must be rescanned by a scanner or the like after film development, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146H01L27/144
CPCH01L27/14676H01L27/14632H01L27/14663H01L27/14687H01L22/14H01L27/0248H01L27/14683H01L31/115
Inventor 岩田弘池田光志
Owner CANON ELECTRON TUBES & DEVICES CO LTD