Method for making liquid ink gun, liquid ink gun and printing equipment

A technology of a liquid inkjet head and a manufacturing method, which is applied in the field of liquid inkjet head and printing equipment, and the manufacture of liquid inkjet head, can solve problems such as poor injection accuracy, and achieve the effect of improving printing speed

Active Publication Date: 2015-03-25
ZHUHAI SAILNER 3D TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a method for manufacturing a liquid inkjet head, a liquid inkjet head and a printing device, which are used to solve the problem of poor ejection accuracy of the existing liquid inkjet head, so as to improve printing speed and printing accuracy

Method used

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  • Method for making liquid ink gun, liquid ink gun and printing equipment
  • Method for making liquid ink gun, liquid ink gun and printing equipment
  • Method for making liquid ink gun, liquid ink gun and printing equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] figure 1 It is a flow chart of the manufacturing method of the liquid inkjet head provided by Embodiment 1 of the present invention. Such as figure 1 As shown, the manufacturing method of the liquid inkjet head may include:

[0046] Step 10, forming a pressure generating component on the substrate.

[0047] Step 20, forming a pressure chamber and a common chamber on the first surface of the substrate.

[0048] Step 30, coating the first resin glue on the surfaces of the pressure chamber and the common chamber away from the substrate to form a spray hole glue layer.

[0049] Step 40: Carry out gray-scale exposure treatment on the spray hole glue layer to form a tapered spray hole at the position on the spray hole glue layer opposite to the pressure chamber. Along the direction away from the pressure chamber, the cross-sectional area of ​​the spray hole is slowing shrieking.

[0050] The aforementioned substrate may be a silicon substrate or a glass substrate, and a ...

Embodiment 2

[0097] This embodiment provides another method for forming a pressure generating component on the basis of the above embodiments, which may specifically include:

[0098] The vibrating plate 4 is formed by depositing on the first surface of the substrate 1 .

[0099] Specifically, it can be formed by low-pressure chemical vapor deposition or plasma-enhanced chemical vapor deposition, and the material of the vibrating plate 4 can be SiO 2 、Si 3 N 4 or SiO 2 -Si 3 N 4 stacks. This step can refer to Figure 10 , Figure 10 It is a schematic structural diagram of forming a vibrating plate on the surface of a substrate in the method for manufacturing a liquid inkjet head provided in Embodiment 2 of the present invention.

[0100] The piezoelectric element 3 is formed on the surface of the vibrating plate 4 away from the base 1 .

[0101] Specifically, the lower electrode layer can be formed by sputtering, the piezoelectric layer can be formed by sol-gel method, and the upp...

Embodiment 3

[0104] This embodiment provides yet another method for forming a pressure generating component on the basis of the above embodiments, which specifically includes:

[0105] A thin film resistance layer 19 is deposited on the first surface of the substrate 1 .

[0106] Specifically, the thin film resistance layer 19 can be deposited on the substrate 1 , and the material of the thin film resistance layer 19 can be one of tantalum aluminum alloy, nickel cadmium alloy, tungsten silicon nitride and titanium nitride. Can refer to Figure 13 , Figure 13 It is a schematic structural diagram of forming a thin-film resistance layer on a substrate in the method for manufacturing a liquid inkjet head provided in Embodiment 3 of the present invention.

[0107] For the forming method of other components in the liquid inkjet head, reference may be made to the technical solutions provided in the above embodiments, and details will not be repeated here. The formed liquid inkjet head structu...

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PUM

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Abstract

The invention provides a method for making a liquid ink gun, the liquid ink gun and printing equipment. The method comprises the steps that a pressure generating component is formed on a base; a pressure chamber and a common chamber are formed on the first surface of the base; the surfaces, away from the base, of the pressure chamber and the common chamber are coated with first resin adhesives, and spray hole adhesive layers are formed; gray exposure treatment is carried out on the spray hole adhesive layers so that conical spray holes can be formed in the positions, corresponding to the pressure chamber, of the spray hole adhesive layers, and the cross section area of the spray holes is gradually reduced in the direction away from the pressure chamber. According to the method for making the liquid ink gun, the liquid ink gun and the printing equipment, the problem that the jet precision of an existing liquid ink gun is poor can be solved so as to improve printing speed and printing precision, the problem that printing quality is lowered due to the fact that the adhesives are adopted can be avoided, and the mechanical strength of the pressure chamber can be improved.

Description

technical field [0001] The invention relates to printer manufacturing technology, in particular to a method for manufacturing a liquid inkjet head, a liquid inkjet head and printing equipment. Background technique [0002] Printer is a commonly used office equipment. With the gradual advancement of printer technology, the speed of file processing and printing is getting more and more attention. In the prior art, the liquid inkjet head structure of the printer usually includes a substrate, an orifice plate bonded on the first surface of the substrate, and a vibrating plate and a piezoelectric element arranged on the second surface of the substrate opposite to the first surface . The processing method of the liquid inkjet head is usually: forming a vibrating plate and a piezoelectric element on the second surface of the substrate, using an etching process to form a plurality of pressure chambers corresponding to the positions of the piezoelectric element on the first surface,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/16
Inventor 李越
Owner ZHUHAI SAILNER 3D TECH CO LTD
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