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Wafer level package structure and technological method thereof

A technology of wafer-level packaging and process methods, which is applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve problems such as high difficulty, alignment displacement deviation of separated chips, and circuit short circuit, so as to reduce production costs and materials cost, effect of shrinking product size

Inactive Publication Date: 2015-03-25
JCET GROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

After the wafer is diced, the individual chips are arranged and pasted on the carrier board for encapsulation and fanout metal circuit production. On the one hand, the alignment efficiency of the chips is low, and the alignment of the separated chips is prone to displacement deviation, which will cause subsequent chip fronts The offset of the fanout metal circuit; because the fanout packaging of the wafer is carried out in the packaging factory, it is relatively difficult for the packaging factory to manufacture the fine-pitch circuits involved in the fanout process, and it is prone to problems of circuit short circuit and circuit stripping, and the yield rate is low

Method used

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  • Wafer level package structure and technological method thereof
  • Wafer level package structure and technological method thereof
  • Wafer level package structure and technological method thereof

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Embodiment Construction

[0033] see figure 1 , a kind of wafer-level packaging structure of the present invention, it comprises lead frame 1, and described lead frame 1 is flip-mounted chip 2, and described chip 2 front is provided with metal bump 3, and described metal bump 3 and chip 2 They are connected by solder balls 4, the metal bumps 3 and solder balls 4 are surrounded by non-conductive glue 5, the surrounding of the lead frame 1 is encapsulated with a plastic encapsulant 6, and the back of the lead frame 1 is electroplated with a metal layer 7.

[0034] Its process method is as follows:

[0035] Step 1, see figure 2 , take a wafer, the circuit design on the front of the wafer completely corresponds to the lead frame drawing, and the size of a single chip is equal to the package size;

[0036] Step two, see image 3 , making metal bumps on the front electrode of the wafer;

[0037] Step three, see Figure 4 , making tin balls on metal bumps;

[0038] Step 4, see Figure 5 , the front s...

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Abstract

The invention relates to a wafer level package structure and a technological method thereof. The wafer level package structure comprises a lead frame (1). A chip (2) is arranged on the lead frame (1) in an inversion mode. A metal bump (3) is arranged on the front face of the chip (2). The metal bump (3) is connected with the chip (2) through a solder ball (4). Non-conducting glue (5) is arranged on the periphery of the metal bump (3) and the periphery of the solder ball (4). A molding compound (6) is packaged on the periphery of the lead frame (1). A metal layer (7) is electroplated on the back face of the lead frame (1). According to the wafer level package structure and the technological method of the wafer level package structure, the drawing design on a wafer completely corresponds to a drawing of the lead frame, the whole chip is installed on the lead frame in the inversion mode and then is cut, separated and packaged, and wafer level package that the single chip size is equal to a single unit of the lead frame is achieved.

Description

technical field [0001] The invention relates to a wafer-level packaging structure and a process method thereof, belonging to the technical field of semiconductor packaging. Background technique [0002] In the existing wafer-level packaging, the wafer is firstly diced, and the front side of the separated chip after scribing is pasted on the carrier board, and then the side of the carrier board where the chip is pasted is plastic-sealed, and the carrier board is removed to expose the front side of the chip. , Perform Fanout rewiring on the front electrode of the chip to make the metal circuit and the electrical output of the product. After the wafer is diced, the individual chips are arranged and pasted on the carrier board for encapsulation and fanout metal circuit production. On the one hand, the alignment efficiency of the chips is low, and the alignment of the separated chips is prone to displacement deviation, which will cause subsequent chip fronts Offset of the fanout...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/488H01L23/495
CPCH01L24/94H01L2224/16245H01L2224/73204
Inventor 王亚琴梁志忠王孙艳
Owner JCET GROUP CO LTD