Three-axis structure and manufacturing process of micro inertial measurement unit based on ltcc process

Abstract

The invention discloses a low temperature co-fired ceramic (LTCC) technology micro inertial measurement unit (MIMU)-based three-axis structure and a manufacturing technology thereof. Circuit devices of X-axis, Y-axis, Z-axis and main control modules are respectively assembled to a LTCC substrate by SMT, the X-axis module and the Y-axis module are installed on a cavity base plate of the LTCC substrate of the Z-axis module in an orthogonal edge-on way so that a three-axis detection module is formed, and the main control module and the three-axis detection module are provided with BGA and are welded to form the three-axis MIMU assembly. The structure provided by the invention adopts a module design, has a small volume and light weight, and reduces size effect-caused adverse influences. Interconnection lines between devices are short so that transmission loss and crosstalk are reduced. The X-axis module and the Y-axis module are installed on a cavity base plate of the LTCC substrate of the Z-axis module in an orthogonal edge-on way so that X-Y-Z three-axis inertial 3D orthogonal detection is effectively realized. The structure is simple. The manufacturing technology has reliable processes and installation accuracy. A housing heat-radiation boss improves MIMU heat radiation performances and extraneous electromagnetic interference resistance.

Description

technical field [0001] The invention relates to a three-axis structure and manufacturing process of a micro inertial measurement unit based on LTCC technology. Background technique [0002] Micro-inertial measurement unit (MIMU) is an autonomous navigation system that does not rely on any external information and does not radiate energy outward. It can provide continuous real-time information on the position, velocity and attitude of the moving carrier. It has good concealment and is not susceptible to external interference. , high data update rate, high short-term accuracy and good stability, etc. It is mainly composed of two parts: data collection and navigation solution. [0003] The data acquisition part consists of inertial measurement element, temperature sensor, three-axis electronic compass, MEMS (micro-electromechanical system) pressure sensor, signal conditioning circuit, A / D (digital / analog) conversion circuit and FPGA (field programmable gate array) controller a...

AI Technical Summary

Problems solved by technology

[0006] 1) The inertial device is installed on three orthogonal surfaces of the three-dimensional structure, and the circuit is distributed on multiple signal boards, which may easily cause unreliability and noise in the connection of the circuit;

[0007] 2) In the three-dimensional structure, the installation of the three accelerometers is affected by the large and uncompact size of the three-dimensional structure. Due to the size effect, the accelerometer will generate a large additional error output when the carrier moves, which affects the accuracy of navigation.

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