Method for inhibiting metal surface carbon deposition by using atomic layer deposition passivation layer

Abstract

The invention discloses a method for inhibiting metal surface carbon deposition. The method eliminates carbon deposition formed by the catalytic action of a metal at a high temperature and prolongs the service life of a fluid system. The method mainly comprises the following steps: (1) connecting a to-be-passivated fluid system with an atomic layer deposition system gas path; (2) carrying out atomic layer deposition of inert compound on the inner wall of the fluid system, specifically comprising the following steps: injecting a first reaction precursor into a reaction chamber; and injecting a second reaction precursor after cleaning and then cleaning; and (3) repeating the operations and acquiring the passivation layer with required thickness by controlling the number of cycle periods. The method disclosed by the invention is high in degree of automation, good in repeatability, relatively low in process and free of damage to a substrate; in the deposition process, the thickness of the thin film is precise to control, a flow passage is easily prevented from being blocked, and the method is suitable for passivation processing the flow system which is expensive in price and complex in structure.

Description

technical field [0001] The invention relates to a preparation method of an anti-carbon deposition passivation layer on a metal surface, which can be used for carbon deposition suppression in various fluid systems transporting hydrocarbon compounds at high temperatures. Background technique [0002] The fuel delivery pipelines of aviation, automobile, ship and other engines and their heat exchange components are processed by heat-resistant stainless steel or high-temperature alloys, which contain a large amount of active metal components such as Fe, Cr, and Ni. Under the catalysis of active metal components, hydrocarbon fuels rapidly generate metal carbides (NiC 3 , Fe 3 C, etc.), and then form carbon deposits through a series of reactions. Due to the small diameter of the fuel delivery pipeline, it will be further narrowed at the nozzle, and even smaller in the engine control device. The generated carbon deposits will easily block the fuel delivery pipeline, nozzles and pr...

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Problems solved by technology

However, acidic molecular sieves can also catalyze the formation of carbon deposits, resulting in rapid deactivation of the catalyst, and this technology also has the disadvantages of easy peeling of the coating and difficulty in controlling the thickness

In addition to the above defects, the above various passivation layer preparation methods lack precise control of the thickness of the passivation layer; for complex fluid paths, these methods can easily cause microchannel blockage, so they are not suitable for expensive solid engines or heat exchange components. try it on

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