A method of suppressing carbon on metal surface by using atomic layer deposition passivation layer

Abstract

The invention discloses a method for suppressing carbon on the surface of a metal. This method eliminates carbon deposits formed by metal catalysis at high temperatures and prolongs the service life of the fluid system. The main steps are: (1) connect the fluid system to be passivated with the gas path of the atomic layer deposition system; (2) perform atomic layer deposition of an inert compound on the inner wall of the fluid system, and the specific steps are: inject the first Reaction of the precursor; injecting the second reaction precursor after cleaning, and then cleaning; (3) cyclically performing the above operations, and obtaining a passivation layer with a required thickness by controlling the number of cycles. The invention has high degree of automation and good repeatability; the process temperature is low and does not cause damage to the substrate; the thickness of the film is precisely controlled during the deposition process, and the fluid channel is not easy to be blocked, and is suitable for passivation processing of the fluid system with high cost and complex structure.

Description

technical field [0001] The invention relates to a preparation method of an anti-carbon deposition passivation layer on a metal surface, which can be used for carbon deposition suppression in various fluid systems transporting hydrocarbon compounds at high temperatures. Background technique [0002] The fuel delivery pipelines of aviation, automobile, ship and other engines and their heat exchange components are processed by heat-resistant stainless steel or high-temperature alloys, which contain a large amount of active metal components such as Fe, Cr, and Ni. Under the catalysis of active metal components, hydrocarbon fuels rapidly generate metal carbides (NiC 3 , Fe 3 C, etc.), and then form carbon deposits through a series of reactions. Due to the small diameter of the fuel delivery pipeline, it will be further narrowed at the nozzle, and even smaller in the engine control device. The generated carbon deposits will easily block the fuel delivery pipeline, nozzles and pr...

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Problems solved by technology

However, acidic molecular sieves can also catalyze the formation of carbon deposits, resulting in rapid deactivation of the catalyst, and this technology also has the disadvantages of easy peeling of the coating and difficulty in controlling the thickness

In addition to the above defects, the above various passivation layer preparation methods lack precise control of the thickness of the passivation layer; for complex fluid paths, these methods can easily cause microchannel blockage, so they are not suitable for expensive solid engines or heat exchange components. try it on

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