Preparation method of high-opening-ratio mask board and mask board

A mask and aperture ratio technology, applied in the field of mask and mask preparation, can solve the problems of low aperture ratio, inability to achieve high-resolution screen evaporation, etc., to achieve increased aperture ratio and complete protection The effect of ensuring the accuracy of evaporation

Active Publication Date: 2015-04-08
KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] For this reason, the technical problem to be solved by the present invention is that the Invar (Invar alloy) mask plate opening ratio in the prior art is low and the position of the opening has a large deviation, so that the evaporation of the high-resolution screen cannot be realized, and then A method for preparing a mask with a high aperture ratio is provided, and the mask prepared by the method has a relatively high aperture ratio

Method used

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  • Preparation method of high-opening-ratio mask board and mask board
  • Preparation method of high-opening-ratio mask board and mask board
  • Preparation method of high-opening-ratio mask board and mask board

Examples

Experimental program
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Effect test

Embodiment 1

[0031] Such as figure 2 and image 3 As shown, the preparation method of a high aperture ratio mask plate related to the present invention comprises the following steps:

[0032] S1: Coating light-curing material on the surface of the mask plate, and curing the light-curing material in the main area 02 of the mask plate and the connecting bridge reserved area 05 to form a low polymer, and cleaning with alcohol to remove the bridge to be corroded area 04 Light-curing materials whose surface has not been cured;

[0033] S2: Immerse the mask plate coated with low polymer prepared in step S1 into FeCl with a concentration of 80-95% 3 Solution, soaked for 30-300 seconds under the condition of energized voltage of 70-100v to remove the connecting bridge to be corroded area 04, and obtain a mask plate coated with a low polymer; the low polymer is polyimide .

[0034] S3: The mask plate coated with the low polymer is placed in a solution of dimethylacetamide and soaked for 15-25 ...

Embodiment 2

[0039] Another embodiment of the present invention is as Figure 4 As shown, a method for preparing a mask plate with a high aperture ratio of the present invention comprises the following steps:

[0040] S1: Coating light-curing material on the surface of the mask plate, and curing the light-curing material in the main area 02 of the mask plate and the connecting bridge reserved area 05 to form a low polymer, and cleaning with alcohol to remove the bridge to be corroded area 04 Light-curing materials whose surface has not been cured;

[0041] S3, immerse the mask plate coated with the low polymer prepared in step S2 into FeCl with a concentration of 80-95% 3 Solution, soaked for 30-300 seconds under the condition of energized voltage of 70-100v to remove the connecting bridge to be corroded area 04, and obtain a mask plate coated with a low polymer; the low polymer is polyimide .

[0042] S4: The mask plate coated with the low polymer is placed in a solution of dimethylace...

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PUM

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Abstract

The invention provides a preparation method of a high-opening-ratio mask board. The preparation method comprises the following steps: step 1, coating a photo-curing material on the surface of the mask board; performing ultraviolet irradiation and curing on the photo-curing material in a mask board main body region and in a connecting bridge retention region to form a low polymer; washing and removing the uncured photo-curing material from the surface of a to-be-corroded region of a connecting bridge, then soaking the mask board of which the surface is coated with the low polymer into a corrosive solution to remove the to-be-corroded region of the connecting bridge so as to obtain the mask board of which the surface is coated with the low polymer; step 2, removing the low polymer from the surface of the mask board to obtain the high-opening-ratio mask board. By reducing the width of the connecting bridge of the mask board main body, the opening ratio of the mask board can be effectively increased and can be increased by 30% to 50% specifically.

Description

technical field [0001] The invention relates to the technical field of manufacturing an organic electroluminescent device, in particular to a method for preparing a mask with a high aperture ratio and a mask prepared by the method. Background technique [0002] As a new generation of display devices, organic light-emitting displays (OLEDs) have incomparable advantages over traditional displays, such as self-illumination, no need for backlight, ultra-thin and flexible displays, low driving voltage, power saving, fast response, etc. etc., are widely used. [0003] The RGB juxtaposition method is a basic method for OLED devices to realize full-color display. In this method, R / G / B monochrome devices are used as sub-pixels and combined into one pixel to realize full-color display. The method makes full use of the high-efficiency characteristics of the OLED device, and the manufactured screen body has high efficiency and low power consumption. When evaporating R / G / B sub-pixels,...

Claims

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Application Information

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IPC IPC(8): H01L51/56
CPCH10K71/00
Inventor 张秀玉刘周英党鹏乐张小宝
Owner KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT
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