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Multiband terahertz filter and manufacture method of multiband terahertz filter

A manufacturing method and terahertz technology, which are applied in the terahertz field to achieve the effects of large polarization insensitivity, good out-of-band suppression performance, and ingenious design ideas.

Active Publication Date: 2015-04-08
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the terahertz filters involved in the prior art are single-band or dual-band filters, and do not involve multi-band terahertz filters. In the fields of radio communication and other fields, multi-band systems are urgently needed to enhance communication capabilities. Therefore, this field urgently needs Development of a multi-band terahertz filter

Method used

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  • Multiband terahertz filter and manufacture method of multiband terahertz filter

Examples

Experimental program
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Effect test

Embodiment 1

[0067] A 3-band terahertz filter made by the following method:

[0068] Step 1: cleaning the single crystal Z-cut quartz substrate;

[0069] In this step, the cleaning process is as follows:

[0070] (1) Put the quartz substrate into the acetone solution, and ultrasonically clean it for 5-10 minutes;

[0071] (2) Take out the substrate and put it into isopropanol (IPA) for ultrasonic cleaning for 5-10 minutes;

[0072] (3) Take out the substrate and clean it with deionized water, and dry the substrate with a nitrogen gun;

[0073] Step 2: depositing a metal aluminum (Al) film layer on the cleaned quartz substrate;

[0074] In this step, magnetron sputtering technology is used to deposit a 200nm thick metal aluminum film layer on the cleaned quartz substrate at room temperature; a metal film with a thickness of more than 200nm can ensure that it does not pass through electromagnetic waves; magnetron sputtering is a new technology in the field Routine operation, no more deta...

Embodiment 2

[0091] A 3-band terahertz filter made by the following method:

[0092] Step 1: cleaning the quartz substrate;

[0093] In this step, the cleaning process is as follows:

[0094] (1) Put the quartz substrate into the acetone solution, and ultrasonically clean it for 5-10 minutes;

[0095] (2) Take out the substrate and put it into isopropanol (IPA) for ultrasonic cleaning for 5-10 minutes;

[0096] (3) Take out the substrate and clean it with deionized water, and dry the substrate with a nitrogen gun;

[0097] Step 2: Spin-coat optical photoresist on the quartz substrate and bake;

[0098] In this step, first place the sample on a hot plate and bake at 120°C for 10 minutes to remove the moisture on the surface, then spin-coat S1813 photoresist with a thickness of about 1 μm, and place it in an oven for 40 minutes at 110°C;

[0099] Step 3: Exposure and development to obtain a periodic 3-ring structure pattern of the photoresist;

[0100] In this step, the S1813 photoresis...

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Abstract

The invention relates to a multiband terahertz filter. The terahertz filter comprises a substrate and a metal film which are arranged in sequence from bottom to top, wherein a periodic structure is etched on the metal film; the periodic structure consists of n concentric annuli; n is a wave band quantity of the terahertz filter; the widths of the n concentric annuli are gradually increased from circle centre to outside. The invention also discloses a manufacture method of the multiband terahertz filter. As passing bands are increased, the multiband terahertz filter provided by the invention has the advantages of having good out-of-band rejection performance of the middle passing bands, polarization insensitivity and wide acceptance angle, and realizing the controllability of filtering frequency band and wave band quantity of the filter; the manufacture method is simple to operate; the multi-step technologies of the manufacture method all refer to conventional operations in the semiconductor field; the large-scale and integrated production is easy.

Description

technical field [0001] The invention belongs to the field of terahertz, and relates to a multi-band terahertz filter and a manufacturing method thereof, in particular to a multi-band terahertz filter based on a metal multi-ring periodic structure and a manufacturing method thereof. Background technique [0002] Terahertz (THz) waves refer to electromagnetic waves with a frequency between 0.1 and 10 THz (corresponding to a wavelength of 30 μm to 3 mm). THz waves are not only a transition from macroscopic classical theory to microscopic quantum theory, but also a transition from electronics to optics. For quite a long time, due to the lack of THz sources and detection means, there were few studies on this band, which became the THz gap on the electromagnetic wave. With the acquisition of broadband and stable pulsed terahertz sources, terahertz technology has gradually become a research hotspot. The unique physical characteristics of terahertz waves, such as transient, low en...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/20H01P11/00
Inventor 董凤良徐丽华宋志伟闫兰琴亓丽梅褚卫国
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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