Supercharge Your Innovation With Domain-Expert AI Agents!

Method for preparing an electrode pattern of conductive silicone rubber, electrostatic chuck composed entirely of silicone rubber, and method for manufacturing the same

A technology for electrode patterns and manufacturing methods, which is applied in the field of processing conductive silicone rubber sheets into electrode pattern shapes, and can solve problems such as large elongation and difficulty in processing electrode patterns

Active Publication Date: 2015-04-29
SHINKOH MOLD
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, conductive silicone rubber is soft and has a large elongation, so it is very difficult to process fine electrode patterns

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for preparing an electrode pattern of conductive silicone rubber, electrostatic chuck composed entirely of silicone rubber, and method for manufacturing the same
  • Method for preparing an electrode pattern of conductive silicone rubber, electrostatic chuck composed entirely of silicone rubber, and method for manufacturing the same
  • Method for preparing an electrode pattern of conductive silicone rubber, electrostatic chuck composed entirely of silicone rubber, and method for manufacturing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1、2

[0099] Made of methylvinyl polysiloxane with an average degree of polymerization of 8,000, composed of 99.6 mol% of dimethylsiloxane units and 0.4 mol% of methylvinylsiloxane units, and capped with trimethylsiloxy groups at both ends. To 100 parts by mass of oxane, 60 parts by mass of acetylene black as carbon black was blended with a pressurized kneader, kneaded to make it uniform, and prepared a kneaded rubber. With respect to 100 parts by mass of the rubber compound, 0.1 parts by mass of vinylsiloxane complex of chloroplatinic acid (platinum content 1 mass %), 0.05 parts by mass of ethynylcyclohexanol as a platinum catalyst control agent and The following formula (2)

[0100] (CH 3 ) 3 SiO[(CH 3 ) 2 SiO] 18[(CH 3 )HSiO] 20 Si(CH 3 ) 3

[0101] (2)

[0102] 2 parts by mass of the methylhydrogenpolysiloxane shown was fully kneaded with twin rolls to prepare an uncured conductive silicone rubber composition.

[0103] The conductive silicone rubber composition was s...

Embodiment 3

[0110] In 100 parts by mass of A and B of the liquid insulating silicone rubber material KE-1934A / B [trade name, manufactured by Shin-Etsu Chemical Co., Ltd.] compounded with a silicone resinous copolymer at a ratio of 1:1 250 parts by mass of silver glass beads S-5000-S3 [trade name, manufactured by Portables Barotini Co., Ltd.], which coated glass beads with silver as a conductive filler, were added and mixed to prepare a liquid uncured conductive silicone rubber. combination.

[0111] After defoaming the conductive silicone rubber composition, a predetermined amount was discharged on the blasted surface of a process film made of polyethylene terephthalate with a thickness of 100 μm. A stainless steel frame with a thickness of 0.2 mm was installed, and the glossy side of a polyethylene terephthalate film with a thickness of 100 μm was placed from above, and the upper and lower sides were sandwiched between two stainless steel plates with a thickness of 3 mm. Using a 50-ton ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Volume resistivityaaaaaaaaaa
Thicknessaaaaaaaaaa
Volume resistivityaaaaaaaaaa
Login to View More

Abstract

The invention provides a method for preparing an electrode pattern of conductive silicone rubber, electrostatic chuck composed entirely of silicone rubber, and a method for manufacturing the same. The preparation method is characterized in that conductive silicone rubber composition is made into sheet material, which is cured after being stacked with a step film which is not cut, and the excessive conductive silicone rubber sheet material is stripped from the step film after the conductive silicone rubber sheet material is cut into electrode pattern shapes.

Description

technical field [0001] The present invention relates to a method for processing a conductive silicone rubber sheet into an electrode pattern shape, and particularly to a method for producing an electrode pattern made of conductive silicone rubber capable of precisely processing a complicated electrode pattern shape. Furthermore, it relates to a stretchable all-silicone rubber electrostatic chuck in which the conductive silicone rubber electrode pattern is embedded in an insulating silicone rubber, and a method for manufacturing the same. Background technique [0002] A typical flexible printed circuit board forms an electrode pattern by forming a resist on the copper foil surface of a laminate of an insulating film and copper foil, and then removing the copper foil without the resist by etching. In addition, in the film wiring board, an electrode pattern is produced by applying conductive ink such as carbon paste or silver paste as a conductor to an insulating film. These a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L21/683H02N13/00
CPCH01L21/28H01L21/6831H02N13/00
Inventor 中野昭生依田昌弘
Owner SHINKOH MOLD
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com