Flexible substrate double-sided magnetron sputtering wound coating machine
A technology of magnetron sputtering and flexible substrates, which is applied in the field of double-sided magnetron sputtering winding coating machines for flexible substrates, and can solve the problem of unreasonable placement of magnetron sputtering sources and easy falling of coating fragments on the surface of substrates. , increase equipment manufacturing costs and other issues, to reduce the frequency of target replacement, prolong the use time of the target, and improve the yield
Active Publication Date: 2015-05-06
青岛久越新材料科技有限公司
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Problems solved by technology
The disadvantages of this production process are: low production efficiency and high production cost; and because after two production cycles, there is a vacuum chamber exposed to the atmosphere during the process, the first film forming and rewinding are easy to occur in the coating process. Material defects such as thermal deformation, wrinkling, pinholes, etc., affect the yield of products
The location of the magnetron sputtering source of the double-sided coating machine is unreasonable, so that the coating fragments are easy to fall on the surface of the substrate, which can easily cause pinhole defects
At the same time, it makes the structure complex and increases the cost of equipment manufacturing
Method used
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[0036] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but the content protected by the present invention is not limited to the following description.
[0037] Such as figure 1 with figure 2 As shown, the flexible substrate double-sided magnetron sputtering winding coating machine includes a vacuum system, a winding system 2, a sputtering system 3 and a pretreatment system 4, and the vacuum system includes a vacuum chamber 1 and a vacuum pump; the winding system 2, Both the sputtering system 3 and the pretreatment system 4 are arranged in the vacuum chamber 1;
[0038] The vacuum system is used to evacuate the vacuum chamber 1 to the vacuum environment required by magnetron sputtering;
[0039] The winding system 2 is used to realize the unwinding and winding of the base material 8, and the winding system 2 includes an unwinding mechanism 201, a first coating drum 207, a second coating drum 217 a...
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The invention discloses a flexible substrate double-sided magnetron sputtering wound coating machine which comprises a vacuum chamber, and a winding system, a sputtering system and a pretreatment system which are arranged inside the vacuum chamber, wherein the vacuum system is used for vacuumizing the interior of the vacuum chamber to a vacuum environment needed by magnetron sputtering; the winding system is used for unwinding and winding the substrate and comprises an unwinding mechanism, a first coating drum, a second coating drum and a winding mechanism; the substrate released by the unwinding mechanism passes through the first coating drum and the second coating drum and is wound by the winding mechanism; the sputtering system is used for coating the substrate passing through the first coating drum and the second coating drum so as to obtain a coated product; and the pretreatment system is used for simultaneously treating the two surfaces of the base material and activating the surface of the base material. With the adoption of the coating machine with the two coating drums, double-side coating of the flexible substrate can be finished once. Compared with the traditional coating mode with two production cycles, the production time can be shortened, and the production efficiency is improved.
Description
technical field [0001] The invention belongs to the technical field of vacuum coating, in particular to a double-sided magnetron sputtering coil coating machine for flexible substrates. Background technique [0002] Magnetron sputtering is one of the important methods of vacuum coating, which has the advantages of high precision of film thickness control and good coating uniformity. In recent years, with the continuous expansion of market demand for flexible optoelectronic products, especially for products with complex film structures, the demand for double-sided coating products has become an expanding trend. For double-sided magnetron sputtering coating products on flexible substrates, the production process can be used to first complete the coating on one side of the coil in one coating cycle, and complete the film formation on the other side in the next coating cycle. The disadvantages of this production process are: low production efficiency and high production cost; a...
Claims
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IPC IPC(8): C23C14/35C23C14/56
Inventor 谈琦
Owner 青岛久越新材料科技有限公司