Full optical path drift compensation high-precision roll angle measuring method and device

Abstract

The invention discloses a full optical path drift compensation high-precision roll angle measuring method and a device, and belongs to the technical field of photovoltaic testing. By using a pair of retro-reflector as sensitive device, the roll angle information is obtained through the parallel two-beam differential measurement, in which the parallel beam through a set of double pentagonal prism and a pentagonal prism splitting the collimated laser beam after splitting obtained by the dual beam parallelism prism precision guaranteed without adjustment, greatly enhance the feasibility and practicability of measurement methods; by using a rectangular prism as beam translation and reverse means that two beams measuring light path completely overlap, and the light path direction reciprocal use This feature, in twice while improving measurement resolution, combined with a total path of the light drift compensation method, can achieve all-optical laser beam path is completely drift compensation, to resolve the current measuring method using laser collimation of the laser beam cannot completely eliminate the drift angle the impact of the common problems that can achieve the roll angle measurement resolution of better than 0.1 'accuracy of better than 1'; compact optical structure of the present invention, the adjustment is simple, no more freedom crosstalk error, moving parts without cable, easy on-site measurement .

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to a roll angle measurement method and device for realizing full compensation of laser beam drift. Background technique [0002] In the fields of high-precision machinery manufacturing, processing, and testing, it is very important to correct geometric and motion errors to improve the accuracy of linear motion systems. Therefore, research on high-precision measurement methods and technologies for six-degree-of-freedom errors has always been an important topic, and roll angle errors It is the most difficult parameter to measure in the six degrees of freedom error. In addition, roll angle measurement is also widely used in attitude recognition, installation positioning, etc. [0003] The traditional roll angle measurement method is mainly based on the electronic level based on the direction of gravity and the combined measurement method based on the position o...

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Problems solved by technology

This type of method has a simple structure and is easy to measure and integrate multiple parameters at the same time, but the parallel adjustment of the two beams is difficult. In addition, the influence of laser beam drift limits the improvement of measurement accuracy.

Although the common-path structure and the dual-optical-path differential method adopted in the method proposed in the Chinese patent ZL2010101664995 and the document "Research on Roll Angle High-Precision Measurement Method in Simultaneous Measurement of Multi-DOF Errors" (Zhai Yusheng, doctoral thesis, Beijing Jiaotong University, 2012) Measurement can basically eliminate the influence of laser beam parallel drift and common mode noise, but the influence of laser beam angle drift on a single optical path in the dual optical path still cannot be eliminated

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