Transmission system used in five-chamber automatic electron beam deposition system

A technology of electron beam deposition and transmission system, which is applied in the field of transmission system used in the five-cavity automatic electron beam deposition system, can solve the problems of long production time and high cost, and achieve improved single output, small size, and energy saving The effect of pumping time

Active Publication Date: 2015-05-20
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The system solves the problems of long production time and high cost in the prior art

Method used

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  • Transmission system used in five-chamber automatic electron beam deposition system

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0019] Such as figure 1 As shown, the present invention includes an automatic transmission mechanism, a lifting cylinder, a sample carrier plate and a sample rack, and the five-chamber body includes a transmission chamber I, a loading chamber I A, a process chamber B, a loading chamber II C, and a transmission chamber II connected in sequence, wherein The loading chamber I A, the process chamber B and the loading chamber II C are all equipped with a lifting cylinder, a sample carrier and a sample rack. The sample rack is connected to the motor and rotated by the drive of the motor. The sample carrier is set on the sample On the rack, the lifting cylinder lifts or lowers the sample carrier, and the automatic transmission mechanism carries the sample carrier to move between the cavities.

[0020] Described loading chamber 1 A is provided with loading chamber 1...

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Abstract

The invention relates to the technical field of preparation of various films on glass, plastic and ceramic matrixes, and concretely relates to a transmission system used in a five-chamber automatic electron beam deposition system. The transmission system used in five-cavity automatic electron beam deposition system comprises an automatic transmission mechanism, an elevating cylinder, a sample support plate and a sample rack, the five chambers comprise a transmission chamber I, a loading chamber I, a technology chamber, a loading chamber II and a transmission chamber II which are connected in order, wherein an elevating cylinder, a sample support plate and a sample rack are arranged in the loading chamber I, the technology chamber and the loading chamber II, the sample rack is connected to a motor and is driven to rotate through the motor, the sample support plate is arranged on the sample rack, the elevating cylinder is capable of lifting or descending of the sample support plate, and the automatic transmission mechanism carries the sample support plate to move among chambers. According to the invention, the output is high, the air exhaust time in the technology chamber after the sample support plate is replaced can be saved, and process and pick-and-place of the sample support plate can be carried out simultaneously.

Description

technical field [0001] The invention relates to the technical field of preparing various thin films on glass, plastic and ceramic substrates, in particular to a transmission system used in a five-chamber full-automatic electron beam deposition system. Background technique [0002] Through the application of electron beam deposition, the plastic surface is metallized, and the combination of organic materials and inorganic materials greatly improves its physical and chemical properties, making the surface smooth and improving the surface hardness. The surface of the original plastic is soft and easily damaged. Through vacuum coating, the hardness and wear resistance are effectively increased, and the water absorption rate is reduced. The more coating times, the less pinholes, the lower the water absorption rate, and the product is not easy to deform, easy to clean, and non-absorbent. dust. The electron beam deposition method is a continuous automatic production method with th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C16/54
Inventor 赵科新赵崇凌李士军洪克超徐宝利张健张冬王磊李松林峰雪
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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