An atomic force microscope system suitable for high-speed scanning

Abstract

An atomic force microscope system suitable for high-speed scanning, including an X-direction scanner mounted on a vertical lift motor for one-dimensional scanning of the sample in the horizontal direction, and a corresponding Y, Z scanner for the sample. A two-dimensional scanning module that scans in the direction, and an optical lever detection module and an optical microscope module that are connected to the optical path of the two-dimensional scanning module for optical detection of the sample. The sample is fixed on the X-direction scanner. An atomic force microscope system suitable for high-speed scanning of the present invention can obtain higher scanner bandwidth and better optical observation effect while ensuring smaller laser spot size and wider beam tracking capability.

Description

technical field [0001] The invention relates to an atomic force microscope system. In particular, it relates to an atomic force microscope system suitable for high-speed scanning. Background technique [0002] Atomic force microscopy is an important tool for micro-nano-scale morphology characterization and physical property testing, and has a wide range of applications in the fields of semiconductors, nanomaterials, new energy, and life sciences. The atomic force microscope has high resolution, no requirement for the conductivity of the sample, can work in various environments such as atmosphere, liquid phase, and vacuum, and can realize many advantages such as in-situ testing and processing. One of the necessary testing instruments in the manufacturing industry. [0003] Despite the advantages that other equipment cannot match, the atomic force microscope also has some obvious shortcomings. Low work efficiency is the most prominent shortcoming of this type of equipment a...

AI Technical Summary

Problems solved by technology

In the first configuration, the 3D scanner carries the sample, and its bandwidth is limited by the sample mass, so it is only suitable for very small samples

In the second structure, in order to ensure that the position of the laser spot relative to the cantilever beam remains unchanged when the probe moves with the scanner, a tracking lens mechanism must be introduced. Spot shift occurs

The system is not ideal for optical observation of samples due to the inability of a single aspheric lens to eliminate chromatic aberration

On the other hand, since the aspherical lens is mounted on the Z scanner, the bandwidth of the Z scanner is reduced, which limits the further improvement of the scanning speed.

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