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Graphite boat identification system and method for silicon chip production

A recognition system, graphite boat technology, applied in the direction of general control system, control/regulation system, comprehensive factory control, etc., can solve the problems of error-prone, poor product traceability, manual input can not meet the automation system, etc., to reduce errors, The effect of improving productivity

Active Publication Date: 2015-06-03
S C NEW ENERGY TECH CORP
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  • Abstract
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AI Technical Summary

Problems solved by technology

The traditional recording method has the following two disadvantages: 1. Manual input is prone to errors, resulting in poor product traceability
2. In the existing technology, the automatic loading and unloading system of the graphite boat has appeared, and the manual input can no longer meet the needs of the automation system

Method used

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  • Graphite boat identification system and method for silicon chip production
  • Graphite boat identification system and method for silicon chip production

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Embodiment Construction

[0025] Such as figure 1 As shown, the graphite boat identification system proposed by the present invention includes: a machine platform, a conveyor belt arranged on the machine platform, and a graphite boat arranged on the conveyor belt for loading silicon wafers, and also includes a code reader, a position sensor and industrial computer.

[0026] Two-dimensional codes with different contents are engraved on the same side surface of each graphite boat, and the two-dimensional codes are used to record the boat number or process parameters, etc., and the code reader reads the two-dimensional code information and sends it to the industrial computer for recording. Because the graphite boat is black and has an anti-reflection coating on the surface, it is difficult to read the two-dimensional code. In order to ensure the correct reading of the code reader, the best way is to engrave the two-dimensional code on the graphite boat to a depth greater than or equal to 0.3mm , and adju...

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Abstract

The invention discloses a graphite boat identification system for silicon chip production. The system comprises a stand, a conveyor belt arranged on the stand, graphite boats arranged on the conveyor belt and used for loading silicon chips, a code reader, a position sensor and an industrial personal computer, wherein two-dimensional codes with different contents are engraved on the surface of the same side of each graphite boat, and are read and transmitted to the industrial personal computer for recording through the code reader. The invention further discloses a method for performing identification by virtue of the graphite boat identification system. According to the system and the method, the two-dimensional codes are engraved on the graphite boats, and the contents of the two-dimensional codes are accurately read through the code reader, and are transmitted to the industrial personal computer for recording, so that manual operation is avoided by the reading of the code reader, errors are reduced, and production efficiency can be greatly improved.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a graphite boat identification system and method for silicon wafer production. Background technique [0002] In the photovoltaic industry, tubular PECVD is the main equipment for growing anti-reflective coatings on the surface of silicon wafers. Among them, the graphite boat is a tool for loading silicon wafers. With the development of the photovoltaic industry, the information management of the production process is becoming more and more systematic. It is necessary to record the process of each boat to facilitate product traceability. Therefore, each boat is artificially numbered, and the boat number needs to be input manually on the industrial computer before the process is done. The traditional recording method has the following two disadvantages: 1. Manual input is prone to errors, resulting in poor product traceability. 2. In the existing technology, the automatic loading a...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCG05B19/41875Y02P90/02
Inventor 罗之华杨宝立
Owner S C NEW ENERGY TECH CORP
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