Resonator for lithography equipment noise reduction

Abstract

The invention discloses a resonator for lithography equipment noise reduction. The resonator includes: an inner cavity and a pipe orifice connected to the inner cavity. The pipe orifice consists of an outer wall, an air layer, a sound absorption layer and an inner wall perforated plate from the outside in sequentially. The resonator provided by the invention can realize adjustable resonant frequency, and makes the resonant frequency similar to that of a noise source, thus reaching the technical effect of effective sound absorption.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a resonator used for noise reduction of lithography equipment. Background technique [0002] A lithographic apparatus is a machine that applies a desired pattern to a substrate. For example, lithographic equipment may be used in the manufacture of integrated circuits (ICs). In this case, a patterning device, alternatively referred to as a mask or reticle, may be used to generate a circuit pattern corresponding to a single layer of the IC. The pattern can be imaged onto a target portion (eg, comprising a portion, one or more dies) on a substrate (eg, a silicon wafer). Pattern imaging is performed by imaging the pattern onto a layer of radiation sensitive material (resist) provided on the substrate. Typically, a single substrate will contain a network of adjacent target portions that are sequentially exposed. A conventional lithographic apparatus compri...

AI Technical Summary

Problems solved by technology

[0012] The defect in the above-mentioned technical solution for noise elimination is that reverberation noise also has a huge impact on the internal world of the lithography machine, and there is no solution for this in the existing technical solution

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