Hydrophobic surface dropwise condensation capillary force pickup and vibration control micro-object operation device and method

Abstract

The invention discloses a hydrophobic surface dropwise condensation capillary force pickup and vibration control micro-object operation device and method and relates to a micron-order object operation and micro-assembling technology. The problems that in the prior art, according to a capillary force operation mode, liquid drops remaining at the tail end after a probe is used for dipping are used as operation conditions, the size of the operation liquid drops cannot be controlled effectively, liquid drops which are too large or too small can cause operation task failure, dynamic control over the operation liquid drops after pickup cannot be achieved, and due to the leading role of adhesive force, micro objects adhere to the tail end of the probe after liquid drop disappearing and cannot fall off smoothly are solved. The device comprises a displacement control mechanism, a cooling working operation mechanism and four connecting studs. The displacement control mechanism comprises a vibration isolation table, a three-axis precision electric displacement platform, a connecting bottom plate, a manual displacement lifting table, a vibration module connecting plate, a micrometer head, a micrometer clamp, a piezoelectric ceramic vibration module and a probe clamp. The device and method are used for the field of micron-order object operation.

Description

technical field [0001] The invention relates to micron-level object manipulation and micro-assembly technology, in particular to a micro-object manipulation device and method for capillary force pickup and vibration control of drop-like condensation on a hydrophobic surface. Background technique [0002] As a non-destructive manipulation technique, the droplet-based manipulation method of capillary force micro-objects (objects with a gravity less than 10 μN) has important application value in the assembly of micron-scale objects. The compliance of capillary force manipulation can avoid the traditional mechanical clamping. Stress concentration to avoid damage to key features of the operating object during operation. The existing capillary force operation method generally uses the residual droplet at the end of the probe as the operating condition, which can neither effectively control the size of the operating droplet, because too large or too small droplets will cause the fa...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem of capillary force operation in the prior art, the present invention generally utilizes the liquid drop remaining at the end of the probe after dipping as the operating condition, which cannot effectively control the size of the operating droplet, because too large or too small a droplet will cause The failure of the operation task, the dynamic control of the operation droplet cannot be realized after picking up, and the problem that the micro-object sticks to the end of the probe after the droplet disappears and cannot fall off smoothly due to the dominant effect of the adhesive force, thus providing a new solution for the hydrophobic surface droplet. Apparatus and method for micro-object manipulation of capillary force pickup and vibration control of shape condensation

Images