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Full-band high-precise machining method for aspheric surface optical element

A processing method and aspheric technology, which are used in optical surface grinders, metal processing equipment, control of workpiece feed movement, etc. The effect of improving the quality of optical surfaces

Active Publication Date: 2015-07-15
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

Although this method effectively suppresses the medium and high-frequency errors generated in the processing process and realizes the processing of high-precision aspheric elements, the processing process of this method is too cumbersome, requiring the use of three precision CNC machine tools, and the processing cost is extremely high. high

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  • Full-band high-precise machining method for aspheric surface optical element
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  • Full-band high-precise machining method for aspheric surface optical element

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0020] The processing object of the processing method in this embodiment is a convex aspheric mirror with a diameter of 200 mm and a vertex curvature radius of 1700 mm. refer to figure 1 , the operation steps of the full-band high-precision aspheric surface processing method in this embodiment are as follows:

[0021] Step 1) After the aspherical element to be processed is milled and formed, an interferometer is used to measure the shape error of the aspheric surface at this time.

[0022] Step 2) According to the measured surface shape error data, select a flexible polishing small tool with an aperture size not larger than 1 / 4 of the aspherical surface diameter, and then select the optimal Gaussian-like removal function, and thus determine the processing parameters of CNC machine tools, including revolution speed, eccentricity, positive pres...

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Abstract

The invention discloses a full-band high-precise aspheric surface machining method. The method mainly comprises the following steps: 1) detecting the surface shape of a to-be-machined aspheric surface which is formed by milling and grinding by using an interferometer; 2) according to the error data of the surface shape to be machined, selecting a suitable flexible polishing small tool, and determining machining parameters of a numerical control machine tool by combining a removal function of the small tool; 3) placing an aspheric surface element to be machined on a machining platform of the machine tool, inputting machining parameters, and executing a polishing process by adopting a variable step pitch spiral machining path; 4) after one-period polishing is completed, detecting the surface shape of the aspheric surface element, and repeating the steps 2, 3 and 4 until the precision of the low-frequency surface shape of the aspheric surface reaches a standard according to the feedback situation of the error data of the surface shape; 5) performing PSD (Power Spectral Density) analysis on the surface shape data of the low-frequency surface shape which reaches the standard, selecting a flexible polishing small tool with a large diameter according to medium-high frequency error frequency distribution characteristics determined by a PSD curve, performing fairing process machining on the aspheric surface optical element, and repeating several times until the medium-high frequency error is controlled effectively. According to the full-band high-precise machining method for the aspheric surface optical element, the full-band high-precise machining of the aspheric surface optical element is completed by only using a CCOS (Computer Controlled Optical Surfacing) numerical control small grinding head machine tool.

Description

technical field [0001] The invention belongs to the field of numerical control processing of aspheric optical elements, and in particular relates to a method for controlling full frequency band errors of aspheric optical elements. Background technique [0002] With the development of modern optical element processing technology, the traditional manual processing of aspheric surface has been gradually replaced by the modern advanced manufacturing technology marked by "deterministic processing" - Computer Controlled Optical Surface Shaping (CCOS) technology. CCOS technology is a technology that uses computer-controlled small tools to achieve a certain amount of processing in a certain area. The theoretical basis for material removal is the Preston equation, which is a processing method that relies on positive pressure to achieve effective material removal. A typical gadget construction is a metal chassis covered with a layer of asphalt, often referred to as a rigid disc due to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00
CPCB24B13/012B24B13/02B24B49/12
Inventor 邵建达张逸中魏朝阳胡晨张海超
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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