Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips

Abstract

The invention discloses a controllable high-frequency-response probe test moving device for microwave and millimeter wave chips. The controllable high-frequency-response probe test moving device comprises an industrial personal computer, a control module, a driver, a servo motor, a precision displacement device and a grating ruler. The precision displacement device comprises a precision workbench, a driver I, piezoelectric ceramics and a flexible hinge. The industrial personal computer is connected with the control module, the control module is connected with the driver, the driver is connected with the servo motor, the servo motor is connected with the driver through an encoder, the servo motor is connected with the precision workbench, the precision workbench is connected with the driver I, the driver I is connected with the piezoelectric ceramics, the piezoelectric ceramics is connected with the flexible hinge, the flexible hinge is connected with the workbench, the workbench is connected with the control module through the grating ruler, the driver I is connected with the control module, prior one-time positioning is changed into coarse positioning in which the motor drives a lead screw, and the precision displacement device belongs to secondary positioning of fine positioning. A fine positioning system is high in test speed, and on the premise of not affecting test acceptability, test cycle is shortened greatly, efficiency and productivity are improved, and test cost is reduced.

Description

technical field [0001] The invention relates to a controllable high-frequency response probe testing motion device for microwave and millimeter wave chips. Background technique [0002] The development and production of microwave and millimeter wave high-frequency chips is a cutting-edge high-tech industry in the world today, and its application proportion in modern electronic complete machines is also increasing. Chip testing is not only a link in the integrated circuit industry chain, but also the key to verifying the factory . Chip testing is the best tool for analyzing chip defects. Through testing, the yield can be improved and unnecessary losses can be reduced. [0003] After the semiconductor chip is manufactured and before packaging, the chip on the silicon wafer needs to be tested, and a good chip is selected for packaging. The testing process is: put the test probe on the chip, and the test platform gives the input stimulus signal. Compare the actual output of th...

AI Technical Summary

Problems solved by technology

[0017] In order to solve the above problems, the present invention proposes a controllable high-frequency response probe test movement device for microwave and millimeter-wave chips. The problem to be solved is that the contact stress between the probe and the chip is uncontrollable and the variation range Large size, long test time, low test accuracy, difficult test, etc.

Changing the existing one-time positioning to secondary positioning needs to solve the problem of high precision and fast response of microwave and millimeter wave chip probe testing

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