Monolithic integrated six-degree-of-freedom micro-inertial measurement unit and processing method thereof
A technology of micro-inertial measurement and single-chip integration, which is applied in the direction of acceleration measurement, measurement acceleration, and multi-dimensional acceleration measurement using inertial force. and other problems, to achieve the effect of streamlining and ingenious volume structure, improving space utilization and reducing volume
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[0038] The technical solutions of the present invention will be described in detail below, but the protection scope of the present invention is not limited to the embodiments.
[0039] Such as Figure 1 to Figure 4 As shown, a monolithic integrated six-degree-of-freedom micro inertial measurement unit of the present invention includes a main unit structure 1 bonded and installed in the center of the glass substrate. The main unit structure 1 is square and includes a three-axis accelerometer unit 2 and three Axis gyroscope unit 3; three-axis gyroscope unit 3 includes four square frames 31 with the same structure, and the square frames 31 are symmetrically arranged in pairs in the middle of the four sides of the main unit structure 1, and between each square frame 31 Connected to each other by coupling folded beams 32; the inner side of the square frame 31 is connected with the Z-axis detection structure 33, and the driving structure 34 is connected with the outer side of the sq...
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