QCM (quartz crystal microbalance) sensor with high-quality factor and high-quality sensitivity

Abstract

The invention discloses a QCM (quartz crystal microbalance) sensor with high-quality factor and high-quality sensitivity. A resonant bottom plate with an inverted desk type circular groove in a single surface is adopted, the quality of the peripheral region (a circular ring-shaped platform) of the circular groove of the resonant bottom plate is improved, the layout of an upper metal electrode comprising a circular ring-shaped electrode covering the surface of the circular ring-shaped platform and a circular electrode covering the surface of the circular groove is adopted, and the circular ring-shaped electrode is communicated with the circular electrode through metal conductors, so that an energy trapping effect and an energy concentration effect are improved and the quality factor of the QCM sensor is improved. Meanwhile, the purpose of improving the quality sensitivity of the QCM sensor is achieved by reducing the thickness of partial effective resonant region.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric sensors, and more specifically relates to a QCM sensor with high quality factor and high sensitivity, which can be applied to the fields of chemistry, materials, biology and physics. Background technique [0002] QCM sensor, also called quartz crystal microbalance, is a sensing device made of piezoelectric quartz crystal material working in thickness shear mode. It is very sensitive to mass changes and is usually used to detect small mass changes, and can achieve nanogram-level mass detection. [0003] Sauerbrey G discovered in 1959 that the frequency change of the QCM sensor has a linear relationship with the mass adsorbed on its surface (Sauerbrey G; Verwendung von schwingquarzen zur w¨agung d¨unner schichten und zur mikrow,agung Z.Phys.No.155,1959, 206–222), this discovery has led to the widespread application of QCM sensors in the field of micromass sensing. [0004] In fact, QCM senso...

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Problems solved by technology

like figure 2 As shown, the mass sensitivity distribution of the traditional QCM sensor is uneven, and most areas have low mass sensitivity

[0008] In addition, in some specific occasions, because the test samples are extremely expensive or harmful to the human body, it is impossible to use a large amount of samples

The mass sensitivity of the traditional QCM sensor is not high enough to meet the needs of such a test occasion. At this time, a QCM sensor with high quality factor and high mass sensitivity is needed.

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