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Magnetic recording medium and manufacturing method therefor

A technology of magnetic recording medium and manufacturing method, which is applied in the fields of magnetic recording, data recording, and record carrier manufacturing, etc., can solve the problems of low film formation rate, etc., and achieve the effect of high throughput and high coercivity.

Active Publication Date: 2015-09-02
CANON ANELVA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the MgO target is an insulator, it is necessary to form a film by RF sputtering, and the film formation rate at this time is very low, about 0.1nm / s

Method used

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  • Magnetic recording medium and manufacturing method therefor
  • Magnetic recording medium and manufacturing method therefor
  • Magnetic recording medium and manufacturing method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] make figure 1 The magnetic recording medium 7 of the laminated structure shown in . First, a CoTaZr film with a film thickness of 40 nm as the soft magnetic layer 2 and a Pd film with a film thickness of 3 nm as the metal base layer 3 were formed on the glass substrate 1 . The metal base layer 3 was formed by DC sputtering in an Ar gas atmosphere at a pressure of 0.6 Pa. An orientation control layer 4 formed of a MgO film with a film thickness of 20 nm is sequentially formed on its upper part, and a Fe film with a film thickness of 3 nm and a Pt film with a film thickness of 3 nm are laminated as the magnetic recording layer 5. A carbon film having a film thickness of 3 nm was formed as the protective layer 6 . In addition, after the magnetic recording layer 5 is formed, the substrate is heated to about 500° C., so that the Fe film and the Pt film stacked as the magnetic recording layer 5 are L1 0 type FePt ordered alloy film.

[0040] In this embodiment, one layer...

Embodiment 2

[0042] In Example 2, the film thickness of the orientation control layer 4 was set to 5 nm, and the magnetic recording medium 7 was produced by the same method as in Example 1 for other film thicknesses and film formation conditions.

Embodiment 3

[0044] In Example 3, the film thickness of the metal base layer 3 was set to 10 nm, and the magnetic recording medium 7 was produced by the same method as in Example 1 for other film thicknesses and film formation conditions.

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Abstract

Provided are a magnetic recording medium that uses a L10-type ordered alloy having large magnetic anisot ropy in a magnetic recording layer and allows a magnetic recording medium having high coercive force to be produced with high throughput, and a method for manu facturing the same. A metallic ground layer having a face-centered cubic structure is provided below an orientation control layer for raising the cry stallinity of a magnetic recording layer that includes an ordered alloy having a L10-type structure, whereby it is possible to form a magnetic recording layer having sufficient coercive force even when the orientation control layer is made into a thin film. Because the orientation control layer configured mainly from an oxide can be made into a thin film, it is possible to improve throughput.

Description

technical field [0001] The present invention relates to a magnetic recording medium mounted in various magnetic recording devices and a method of manufacturing the same. Background technique [0002] A perpendicular magnetic recording method is employed as a technique for realizing high-density magnetic recording. As a material for forming the magnetic recording layer of the perpendicular magnetic recording medium, for example, a granular magnetic film is used. [0003] In recent years, there has been an urgent need to reduce the grain size of the magnetic crystal grains in the magnetic film and further increase the recording density of the perpendicular magnetic recording medium. On the other hand, reduction in the grain size of the magnetic crystal grains reduces the thermal stability of the recorded magnetization. Therefore, in order to compensate for the decrease in thermal stability caused by the reduction in the grain size of the magnetic crystal grains, it is necess...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/66G11B5/84G11B5/851
CPCG11B5/7325G11B5/737G11B5/84
Inventor 楢舘英知佐藤晃央芝本雅弘山中和人
Owner CANON ANELVA CORP