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A kind of optical heating compensating mirror and using method thereof

A compensating mirror and optical heating technology, which is applied to lasers, laser components, electrical components, etc., to achieve the effects of convenient operation, optimized thermal compensation effect, and simple structure

Active Publication Date: 2018-12-25
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This scheme has a good thermal compensation effect, but requires CO 2 Lasers as an additional source of energy and complex control equipment

Method used

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  • A kind of optical heating compensating mirror and using method thereof
  • A kind of optical heating compensating mirror and using method thereof
  • A kind of optical heating compensating mirror and using method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] see figure 1 and figure 2 shown. An optical heating compensation mirror provided by the present invention comprises a mirror body 1, a laser attenuator 2, a laser beam expander system 3 and an aperture 4;

[0036] There is a through hole in the center of the mirror body 1 for allowing part of the laser light to transmit from the front surface to the rear surface for thermal compensation of the laser cavity mirror;

[0037] Both sides of the mirror body 1 are optically polished, the front surface is coated with a high reflection film, and the rear surface is coated with a high absorption film. The high-reflection film is used to minimize the absorption of laser energy by the mirror body, while the high-absorption film is used to absorb as much laser energy as possible, so as to achieve the best thermal compensation effect with the least energy;

[0038] The laser attenuator 2 is used to attenuate the laser energy transmitted from the front surface to the back surface...

Embodiment 2

[0046] The following uses a specific calculation example to illustrate the ability of the present invention to efficiently reduce the thermal deformation of the spot part of the laser cavity mirror.

[0047] Using ANSYS software, the thermal compensation effect of single crystal silicon optical heating compensation mirror was simulated and calculated. image 3 The result of the simulation calculation. Among them, the black line is the thermal deformation of the spot part of the laser cavity mirror before thermal compensation, and the red line is the thermal deformation of the spot part of the laser cavity mirror after thermal compensation. It can be seen that during the whole working time, the maximum thermal deformation of the spot part of the laser cavity mirror before thermal compensation is 2.6 microns, while the maximum thermal deformation of the spot part of the laser cavity mirror after thermal compensation is 0.06 microns, which is higher than that before thermal stres...

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Abstract

The object of the present invention is to provide a light heating compensation mirror and its usage method. The optical heating compensation mirror includes a mirror body, a laser attenuator, a laser beam expander system and an aperture; during thermal compensation, part of the laser light passes through the center of the mirror body with a central through hole, and then the laser attenuator adjusts the thermal compensation energy, The thermal compensation beam diameter is adjusted through the laser beam expander system composed of concave lens and concave mirror, and the thermal compensation heating range is adjusted through the diaphragm, and then irradiated to the back of the mirror body coated with high absorption film for thermal compensation. The invention can use the light energy of the laser itself to realize uniform thermal compensation of the laser cavity mirror, and reduce the thermal deformation of the spot part of the laser cavity mirror to less than 1 / 40 of the original.

Description

technical field [0001] The invention relates to a light heating compensating mirror and a using method thereof. In particular, it relates to an optical heating compensating mirror which uses the light energy of the laser itself to reduce the thermal deformation of the spot part of the laser cavity mirror to less than 1 / 40 of the original one and its use method. Background technique [0002] With the rapid development of laser technology, the power of lasers is getting higher and higher, and the continuous action time is getting longer and longer. High laser energy causes great thermal deformation of the laser cavity mirror, which significantly reduces the quality of the beam, making it impossible for long-distance transmission, resulting in the failure of the laser system to work normally. Therefore, it is of great significance to reduce the thermal deformation of the laser cavity mirror. [0003] In order to improve the thermal deformation of the laser cavity mirror, many...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/13
Inventor 石文波张增宝何鑫刘嵚张治国马艳华金玉奇
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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