Circular ring type contact parallel plate three dimensional pressure transducer

Abstract

The invention discloses a circular ring type contact parallel plate three dimensional pressure sensor, wherein the sensor comprises a control unit, a circular ring capacitance unit group a stripped capacitance unit group connected with the control unit respectively; the circular ring capacitance unit group is used for measuring the tangential force and the normal force; the stripped capacitance unit group is used for measuring the direction of the tangential force; and the stripped capacitance unit group is set at the four corners outside the substrate circular ring capacitance unit group. The circular ring capacitance unit group comprises more than two groups of circular ring capacitance unit pairs; the circular ring capacitance unit pairs comprise two mutual circular ring capacitance units; the stripped capacitance unit group comprises a differential capacitance unit group in X direction and a differential capacitance unit group in Y direction; the differential capacitance unit group in X direction and the differential capacitance unit group in Y direction comprise more than two mutually differential stripped capacitance units .

Description

technical field [0001] The invention belongs to the technical field of pressure sensors, and relates to a capacitive three-dimensional force pressure sensor, in particular to a ring-type contact-type parallel plate three-dimensional pressure sensor. Background technique [0002] Capacitive tactile sensors have the advantages of simple structure, low cost, high sensitivity and good dynamic response, especially the adaptability to harsh conditions such as high temperature, radiation and strong vibration. However, the output of this type of sensor is generally nonlinear, and the inherent parasitic capacitance and distributed capacitance will affect the sensitivity and measurement accuracy of the sensor. Since the 1970s, with the development of integrated circuit technology, capacitive sensors packaged with miniature measuring instruments have appeared. This new type of sensor can greatly reduce the influence of distributed capacitance and overcome its inherent shortcomings. Ca...

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Problems solved by technology

[0003] According to the deficiencies of the above prior art, the present invention proposes a three-dimensional pressure sensor with a ring-type contact parallel plate, which solves the problem that the capacitive pressure sensor is mainly used for vertical pressure testing through the combination of differential capacitance, and has high linearity , the beneficial effect of high sensitivity

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